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Improved model for the angular dependence of excimer laser ablation rates in polymer materials

Appl. Phys. Lett. 95, 174105 (2009); doi:10.1063/1.3254236

Published 29 October 2009

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J. E. A. Pedder,1 A. S. Holmes,1 and P. E. Dyer2
1Department of Electrical and Electronic Engineering, Imperial College London, Exhibition Road, London SW7 2AZ, United Kingdom
2Department of Physics, University of Hull, Hull HU6 7RX, United Kingdom

Measurements of the angle-dependent ablation rates of polymers that have applications in microdevice fabrication are reported. A simple model based on Beer's law, including plume absorption, is shown to give good agreement with the experimental findings for polycarbonate and SU8, ablated using the 193 and 248 nm excimer lasers, respectively. The modeling forms a useful tool for designing masks needed to fabricate complex surface relief by ablation. ©2009 American Institute of Physics
History: Received 14 August 2009; accepted 30 September 2009; published 29 October 2009
Permalink: http://link.aip.org/link/?APPLAB/95/174105/1
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KEYWORDS and PACS

Keywords
PACS
  • 42.55.Lt
    Gas lasers including excimer and metal-vapor lasers
  • 52.38.Mf
    Laser ablation
  • YEAR: 2009

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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