Improved model for the angular dependence of excimer laser ablation rates in polymer materials
Appl. Phys. Lett. 95, 174105 (2009); doi:10.1063/1.3254236
Published 29 October 2009
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Measurements of the angle-dependent ablation rates of polymers that have applications in microdevice fabrication are reported. A simple model based on Beer's law, including plume absorption, is shown to give good agreement with the experimental findings for polycarbonate and SU8, ablated using the 193 and 248 nm excimer lasers, respectively. The modeling forms a useful tool for designing masks needed to fabricate complex surface relief by ablation.
©2009 American Institute of Physics
| History: | Received 14 August 2009; accepted 30 September 2009; published 29 October 2009 |
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http://link.aip.org/link/?APPLAB/95/174105/1 |
REFERENCES (17)
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- R. Srinivasan and V. Mayne-Banton, Appl. Phys. Lett. 41, 576 (1982).
- A. S. Holmes,
IEE Proc.: Sci., Meas. Technol. 151, 85 (2004) . - J. E. A. Pedder, A. S. Holmes, R. Allott, and K. Boehlen,
Proc. SPIE 6462, 64620W (2007) . - L. Yao, B. Liu, T. Chen, S. Liu, and T. Zuo,
Biomed. Microdevices 7, 253 (2005) . - R. M. Wagterveld, C. W. J. Berendsen, S. Bouaidat, and J. Jonsmann,
Langmuir 22, 10904 (2006) . - P. E. Dyer, D. M. Karnakis, P. H. Key, and P. Monk,
Appl. Surf. Sci. 96, 415 (1996) . - T. W. Hodapp and P. R. Fleming, J. Appl. Phys. 84, 577 (1998).
- C. Paterson, A. S. Holmes, and R. W. Smith, J. Appl. Phys. 86, 6538 (1999).
- J. R. Jiménez, R. G. Anera, L. Jiménez del Barco, and E. Hita, Appl. Phys. Lett. 81, 1521 (2002).
- J. E. A. Pedder and A. S. Holmes,
Proc. SPIE 6106, 61061B (2006) . - K. Schildbach,
Proc. SPIE 1279, 60 (1990) . - P. E. Dyer, in Photochemical Processing of Electronic Materials, edited by I. W. Boyd and R. B. Jackman (Academic, London, 1992).
- R. E. Walkup, J. M. Jasinski, and R. W. Dreyfus, Appl. Phys. Lett. 48, 1690 (1986).
- F. Beinhorn, J. Ihlemann, K. Luther, and J. Troe,
Appl. Phys. A: Mater. Sci. Process. 79, 869 (2004) . - M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge University Press, Cambridge, 1999).
- H. R. Philipp, D. G. Legrand, H. S. Cole, and Y. S. Liu,
Polym. Eng. Sci. 27, 1148 (1987) . - M. K. Ghantasala, J. P. Hayes, E. C. Harvey, and D. K. Sood,
J. Micromech. Microeng. 11, 133 (2001) .







