Direct integration of active Ge1−x(Si4Sn)x semiconductors on Si(100)
Appl. Phys. Lett. 95, 181909 (2009); doi:10.1063/1.3242002
Published 5 November 2009
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Doped and intrinsic Ge1−x−ySixSny alloys are synthesized directly on Si(100) using simple deposition chemistries and their optical and electrical properties are determined. Tuning the Si/Sn ratio at ~4 yields strain-free films with Ge-like cell dimensions, while variation of the ratio around this value produces compressively strained, tetragonal structures with an in-plane lattice constant “pinned” to a value close to that of pure Ge (5.658 Å). First-principles calculations show that mixing entropy thermodynamically stabilizes SiGeSn in contrast to GeSn analogs with the same Sn content. GeSn and SiGeSn are predicted to become metastable for 2% and 12% Sn, respectively, in good agreement with experiment.
©2009 American Institute of Physics
| History: | Received 1 September 2009; accepted 11 September 2009; published 5 November 2009 |
| Permalink: |
http://link.aip.org/link/?APPLAB/95/181909/1 |
KEYWORDS and PACS
PUBLICATION DATA
0003-6951 (print)
1077-3118 (online)
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