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Measurement of heat capacity and enthalpy of formation of nickel silicide using nanocalorimetry

Appl. Phys. Lett. 95, 181911 (2009); doi:10.1063/1.3255009

Published 5 November 2009

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Ravi K. Kummamuru,1,2 Lito De La Rama,1 Liang Hu,1 Mark D. Vaudin,2 Mikhail Y. Efremov,1 Martin L. Green,2 David A. LaVan,2 and Leslie H. Allen1
1Department of Material Science and Engineering, University of Illinois at Urbana-Champaign, Illinois 61801, USA
2Ceramics Division, Materials Science and Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA
The total enthalpy of reaction and heat capacity to 850 °C were measured using differential scanning nanocalorimetry (nano-DSC) for the reaction of a nickel and silicon bilayer at heating rates up to 106  K/s. Exothermic dips in heat capacity attributed to nickel silicide formation were found along with indications of phase changes at 430 and 550 °C. The postreaction phases were identified using electron backscattered diffraction. Samples with a Ni:Si molar ratio of 1.2 heated to 850 °C were a mixture of orthorhombic NiSi and the theta-phase (hexagonal—Ni2Si); samples heated to 790 °C resulted in predominantly NiSi. ©2009 American Institute of Physics
History: Received 10 August 2009; accepted 6 October 2009; published 5 November 2009
Permalink: http://link.aip.org/link/?APPLAB/95/181911/1
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KEYWORDS and PACS

Keywords
PACS
  • 82.60.Fa
    Heat capacities and heats of phase transitions (chemistry)
  • 82.60.Cx
    Enthalpies of combustion, reaction, and formation (chemistry)
  • 65.40.Ba
    Heat capacity of crystalline solids
  • 07.20.Fw
    Calorimeters
  • 79.20.Hx
    Electron-surface impact: secondary emission
  • YEAR: 2009

PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
Publisher:
AIP is a member of CrossRef AIP

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