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Large electromechanical coupling factor film bulk acoustic resonator with X-cut LiNbO3 layer transfer

Appl. Phys. Lett. 95, 182106 (2009); doi:10.1063/1.3258496

Published 5 November 2009

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M. Pijolat,1 S. Loubriat,1 S. Queste,2 D. Mercier,1 A. Reinhardt,1 E. Defaÿ,1 C. Deguet,1 L. Clavelier,1 H. Moriceau,1 M. Aïd,1 and S. Ballandras2
1CEA, LETI, MINATEC, Grenoble, Isere 38000, France
2FEMTO-ST UMR CNRS-UFC-ENSMM-UTBM 6174, Besancon 25030, France

As layer transfer techniques have been notably improved in the past years, lithium niobate (LiNbO3) appears as a candidate for the next generation of ultrawide band radio frequency (rf) filters. Depending on the crystalline orientation, LiNbO3 can achieve electromechanical coupling factors Kt2 more than six times larger than those of sputtered aluminum nitride films. In this letter, a process based on direct bonding, grinding, polishing, and deep reactive ion etching is proposed to fabricate a single crystal LiNbO3 film bulk acoustic resonator. From the fabricated test vehicles, Kt2 of 43% is measured confirming the values predicted by theoretical computations. ©2009 American Institute of Physics
History: Received 8 July 2009; accepted 14 October 2009; published 5 November 2009
Permalink: http://link.aip.org/link/?APPLAB/95/182106/1
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KEYWORDS and PACS

Keywords
PACS
  • 77.65.Fs
    Electromechanical resonance; quartz resonators
  • 81.65.Cf
    Surface cleaning, etching, patterning
  • 81.65.Ps
    Surface polishing, grinding, finishing
  • YEAR: 2009

PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
Publisher:
AIP is a member of CrossRef AIP

REFERENCES (12)

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