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Bifurcation topology tuning of a mixed behavior in nonlinear micromechanical resonators

Appl. Phys. Lett. 95, 183104 (2009); doi:10.1063/1.3258654

Published 4 November 2009

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N. Kacem and S. Hentz
CEA/LETI-MINATEC, Grenoble 38054, France
We report the experimental observation of a four-bifurcation-point (or five possible amplitudes for a given frequency) behavior of electrostatically actuated micromechanical resonators, called the mixed (first hardening then softening) behavior. We also demonstrate both analytically and experimentally tuning the bifurcation topology of this behavior via an electrostatic mechanism. An analytical model allows for the qualitative as well as quantitative explanation of the experiments and serves as a simple tool for design of nonlinear micromechanical devices under high drive. ©2009 American Institute of Physics
History: Received 11 August 2009; accepted 14 October 2009; published 4 November 2009
Permalink: http://link.aip.org/link/?APPLAB/95/183104/1
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KEYWORDS and PACS

Keywords
PACS
  • 85.85.+j
    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
  • 07.10.Cm
    Micromechanical devices and systems
  • YEAR: 2009

PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
Publisher:
AIP is a member of CrossRef AIP

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