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All graphene electromechanical switch fabricated by chemical vapor deposition

Appl. Phys. Lett. 95, 183105 (2009); doi:10.1063/1.3259415

Published 5 November 2009

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Kaveh M. Milaninia,1 Marc A. Baldo,2 Alfonso Reina,1 and Jing Kong2
1Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA
2Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA
We demonstrate an electromechanical switch comprising two polycrystalline graphene films; each deposited using ambient pressure chemical vapor deposition. The top film is pulled into electrical contact with the bottom film by application of approximately 5 V between the layers. Contact is broken by mechanical restoring forces after bias is removed. The device switches several times before tearing. Demonstration of switching at low voltage confirms that graphene is an attractive material for electromechanical switches. Reliability may be improved by scaling the device area to within one crystalline domain of the graphene films. ©2009 American Institute of Physics
History: Received 17 September 2009; accepted 14 October 2009; published 5 November 2009
Permalink: http://link.aip.org/link/?APPLAB/95/183105/1
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KEYWORDS and PACS

Keywords
PACS
  • 84.32.Dd
    Connectors, relays, and switches
  • 85.35.-p
    Nanoelectronic devices
  • 07.10.Cm
    Micromechanical devices and systems
  • 85.85.+j
    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
  • 81.15.Gh
    Chemical vapor deposition
  • YEAR: 2009

PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
Publisher:
AIP is a member of CrossRef AIP

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