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Self-assembled nanodielectrics and silicon nanomembranes for low voltage, flexible transistors, and logic gates on plastic substrates

Appl. Phys. Lett. 95, 183504 (2009); doi:10.1063/1.3256223

Published 4 November 2009

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Hoon-Sik Kim,1 Sang Min Won,2 Young-Geun Ha,3 Jong-Hyun Ahn,4 Antonio Facchetti,3 Tobin J. Marks,3 and John A. Rogers1,2
1Department of Materials Science and Engineering, University of Illinois, 1304 West Green Street, Urbana, Illinois 61801, USA
2Department of Electrical and Computer Engineering, University of Illinois, 1304 West Green Street, Urbana, Illinois 61801, USA
3Department of Chemistry and the Materials Research Center, Northwestern University, Evanston, Illinois 60208-3113, USA
4School of Advanced Materials Science and Engineering, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Suwon 440-746, Republic of Korea
This letter reports the fabrication and electrical characterization of mechanically flexible and low operating voltage transistors and logic gates (NOT, NAND, and NOR gates) using printed silicon nanomembranes and self-assembled nanodielectrics on thin plastic substrates. The transistors exhibit effective linear mobilities of ~680  cm2/V s, on/off ratios >107, gate leakage current densities <2.8×10−7  A/cm2, and subthreshold slopes ~120  mV/decade. The inverters show voltage gains as high as 4.8. Simple digital logic gates (NAND and NOR gates) demonstrate the possible application of this materials combination in digital integrated circuits. ©2009 American Institute of Physics
History: Received 20 August 2009; accepted 4 September 2009; published 4 November 2009
Permalink: http://link.aip.org/link/?APPLAB/95/183504/1
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KEYWORDS and PACS

Keywords
PACS
  • 84.30.Sk
    Pulse and digital circuits
  • 85.30.Tv
    Semiconductor field effect devices
  • 81.05.Cy
    Elemental semiconductors: fabrication, treatment, testing and analysis
  • 81.07.-b
    Nanoscale materials and structures: fabrication and characterization
  • YEAR: 2009

PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
Publisher:
AIP is a member of CrossRef AIP

REFERENCES (19)
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