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Rapid detection of natriuretic peptides by a microfluidic LabChip analyzer with DNA aptamers: Application of natriuretic peptide detection
Rapid detection of brain natriuretic peptide (BNP) concentration can be used for the diagnosis of acute heart failure and for the evaluation of the effectiveness of a clinical therapy. We used the sys...

Complementary metal oxide semiconductor compatible fabrication and characterization of parylene-C covered nanofluidic channels with integrated nanoelectrodes

Biomicrofluidics 3, 031101 (2009); doi:10.1063/1.3212074

Published 18 August 2009

Chih-kuan Tung,1 Robert Riehn,2 and Robert H. Austin3
1Department of Physics, Hong Kong University of Science and Technology, Kowloon, Hong Kong
2Department of Physics, North Carolina State University, Raleigh, North Carolina 27695, USA
3Department of Physics, Princeton University, Princeton, New Jersey 08544, USA
Nanochannels offer a way to align and analyze long biopolymer molecules such as DNA with high precision at potentially single basepair resolution, especially if a means to detect biomolecules in nanochannels electronically can be developed. Integration of nanochannels with electronics will require the development of nanochannel fabrication procedures that will not damage sensitive electronics previously constructed on the device. We present here a near-room-temperature fabrication technology involving parylene-C conformal deposition that is compatible with complementary metal oxide semiconductor electronic devices and present an analysis of the initial impedance measurements of conformally parylene-C coated nanochannels with integrated gold nanoelectrodes. ©2009 American Institute of Physics
History: Received 22 May 2009; accepted 3 August 2009; published 18 August 2009
Permalink: http://link.aip.org/link/?BIOMGB/3/31101/1
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KEYWORDS and PACS

Keywords
PACS
  • 87.85.Rs
    Nanotechnologies - applications in biomedical engineering
  • 87.85.fk
    Biosensors for smart prosthetics
  • 81.16.-c
    Methods of nanofabrication and processing
  • 47.85.Np
    Fluidics (applied)
  • YEAR: 2009

PUBLICATION DATA

ISSN:
1932-1058 (online)
Publisher:
AIP is a member of CrossRef AIP

REFERENCES (22)
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  1. J. R. Lupski, Nat. Genet. 39, S43 (2007). [MEDLINE]
  2. E. L. Heinzen, D. Ge, K. D. Cronin, J. M. Maia, K. V. Shianna, W. N. Gabriel, K. A. Welsh-Bohmer, C. M. Hulette, T. N. Denny, and D. B. Goldstein, PLoS Biol. 6, e1000001 (2008).
  3. Y. M. Wang, J. O. Tegenfeldt, W. Reisner, R. Riehn, X. -J. Guan, L. Guo, I. Golding, E. C. Cox, J. Sturm, and R. H. Austin, Proc. Natl. Acad. Sci. U.S.A. 102, 9796 (2005) [MEDLINE]
    4. R. Riehn, M. Lu, Y. M. Wang, S. F. Lim, E. C. Cox, and R. H. Austin, ibid. 102, 10012 (2005). [MEDLINE]
  4. J. O. Tegenfeldt, C. Prinz, H. Cao, S. Chou, W. W. Reisner, R. Riehn, Y. M. Wang, E. C. Cox, J. C. Sturm, P. Silberzan, and R. H. Austin, Proc. Natl. Acad. Sci. U.S.A. 101, 10979 (2004) [MEDLINE]
    5. W. Reisner, K. J. Morton, R. Riehn, Y. M. Wang, Z. Yu, M. Rosen, J. C. Sturm, Y. Chou, E. Frey, and R. H. Austin, Phys. Rev. Lett. 94, 196101 (2005). [MEDLINE]
  5. J. T. Mannion, C. H. Reccius, J. D. Cross, and H. G. Craighead, Biophys. J. 90, 4538 (2006). [Inspec] [MEDLINE]
  6. J. J. Kasianowicz, E. Brandin, D. Branton, and D. W. Deamer, Proc. Natl. Acad. Sci. U.S.A. 93, 13770 (1996) [MEDLINE]
    7. R. Austin, Nature Mater. 2, 567 (2003). [ISI] [MEDLINE]
  7. X. G. Liang and S. Y. Chou, Nano Lett. 8, 1472 (2008). [Inspec] [MEDLINE]
  8. N. Triroj, M. A. Lapierre-Devlin, S. O. Kelley, and R. Beresford, IEEE Sens. J. 6, 1395 (2006). [Inspec]
  9. J. R. Webster, M. A. Burns, D. T. Burke, and C. H. Mastrangelo, Anal. Chem. 73, 16221 (2001). [ISI] [MEDLINE]
  10. P. Mao and J. Y. Han, Lab Chip 5, 837 (2005). [MEDLINE]
  11. W. L. Li, J. O. Tegenfeldt, L. Chen, R. H. Austin, S. Y. Chou, P. A. Kohl, J. Krotine, and J. C. Sturm, Nanotechnology 14, 578 (2003) [Inspec] [ISI]
    12. C. Peng and S. W. Pang, J. Vac. Sci. Technol. B 24, 1941 (2006).
  12. H. Cao, Z. Yu, J. Wang, J. O. Tegenfeldt, R. H. Austin, E. Chen, W. Wu, and S. Y. Chou, Appl. Phys. Lett. 81, 174 (2002).
  13. S. E. Létant, T. W. van Buuren, and L. J. Terminello, Nano Lett. 4, 1705 (2004). [Inspec]
  14. S. W. Turner, A. M. Perez, A. Lopez, and H. G. Craighead, J. Vac. Sci. Technol. B 16, 3835 (1998).
  15. J. H. Yira and W. F. Beach, U.S. Patent No. 5139813 (August 1992).
  16. W. F. Beach, T. M. Austin, and B. J. Humphrey, European Patent Application No. 0 449 291 A2 (October 1991).
  17. S. -M. Park and J. -S. Yoo, Anal. Chem. 75, 455A (2003). [ISI] [MEDLINE]
  18. P. J. Rodgers and S. Amemiya, Anal. Chem. 79, 9276 (2007). [MEDLINE]
  19. P. Sistat, A. Kozmai, N. Pismenskaya, C. Larchet, G. Pourcelly, and V. Nikonenko, Electrochim. Acta 53, 6380 (2008).
  20. A. J. Bard and L. R. Faulkner, Electrochemical Methods: Fundamentals and Applications, 2nd ed. (Wiley, New York, 2001)
  21. Silicon Nitride and Silicon Dioxide Thin Insulating Films, Electrochemical Society Proceedings, 2001, edited by A. R. Landgrebe and K. B. Sundaram (unpublished), Vol. 2001-7.
  22. D. Stein, M. Kruithof, and C. Dekker, Phys. Rev. Lett. 93, 035901 (2004) [MEDLINE]
    23. R. B. Schoch, H. van Lintel, and P. Renaud, Phys. Fluids 17, 100604 (2005).





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