Nanoscale Topography Measurements with a Metal Nanowire AFM Tip
pp. 85-96
215th ECS Meeting
Volume 19, Issue 24 May 24 - May 29, 2009 , San Francisco, CA
Electrochemical Processing in ULSI and MEMS 4 Editor(s): T. Moffat, J. Stickney, J. Dukovic, H. Deligianni
Volume 19, Issue 24 May 24 - May 29, 2009 , San Francisco, CA
Electrochemical Processing in ULSI and MEMS 4 Editor(s): T. Moffat, J. Stickney, J. Dukovic, H. Deligianni
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This paper describes comparison between atomic force microscope (AFM) measurements with a Si tip and a 200-nm-diameter Ni nanowire tip. A produced nanowire AFM probe successfully produced topographic images showing profiles convoluted with a tip radius of 100-200 nm. Bending stiffness of metal nanowires realizes a smaller lateral spring constant than Si and Si3N4 tips. Inelastic deformations of nanowires occurred under excessive loads. The maximum end deflections for nanowires to break the elasticity, which beam mechanics indicates, were applicable to our observed results.
©2009 COPYRIGHT ECS - The Electrochemical Society
©2009 COPYRIGHT ECS - The Electrochemical Society
| Permalink: | http://dx.doi.org/10.1149/1.3246601 |
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1938-5862 (print)
1938-6737 (online)
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