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Mechanical properties of a-Si:H films studied by Brillouin scattering and nanoindenter

J. Appl. Phys. 67, 6772 (1990); doi:10.1063/1.345064

Issue Date: 1 June 1990

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X. Jiang, B. Goranchev, K. Schmidt, P. Grünberg, and K. Reichelt
Institut für Schicht- und Ionentechnik, Forschungszentrum Jülich, D-5170 Jülich, Federal Republic of Germany
A series of a-Si:H films has been prepared by rf sputtering in a H2-Ar gas mixture. To obtain films with different hydrogen content the hydrogen portion of the gas mixture was changed from 0% to 20%. The shear modulus µ was then measured by the frequency of the surface phonon (Rayleigh wave). The stiffness S and the ultramicrohardness H were measured by using a nanoindenter. From the shear modulus µ and the stiffness S, the Young's modulus E and Poisson's ratio nu were calculated. The intrinsic mechanical stress was measured by the bending-beam method. With increasing hydrogen content of the films, the decrease of Young's modulus, microhardness, and internal stress are observed. Journal of Applied Physics is copyrighted by The American Institute of Physics.
History: Received 28 August 1989; accepted 9 February 1990
Permalink: http://link.aip.org/link/?JAPIAU/67/6772/1
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KEYWORDS and PACS

Keywords
PACS
  • 62.20.Dc
    Mechanical, acoustical, and rheological properties of condensed matter Mechanics and rheology of solids Elasticity, elastic constants
  • 62.20.Fe
    Mechanical, acoustical, and rheological properties of condensed matter Mechanics and rheology of solids Deformation and plasticity (including yield, ductility, and superplasticity)
  • 81.15.Cd
    Materials science Methods of deposition of films and coatings Deposition by sputtering
  • 42.65.Es
    Optics Nonlinear optics Stimulated Brillouin and stimulated Rayleigh scattering
  • YEAR: 1990

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PUBLICATION DATA

ISSN:
0021-8979 (print)   1089-7550 (online)
Publisher:
AIP is a member of CrossRef AIP

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