Depth profiling of nonuniform optical absorption in thin films: Application to hydrogenated amorphous silicon
J. Appl. Phys. 70, 5025 (1991); doi:10.1063/1.349007
Issue Date: 1 November 1991
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The amplitude of interference fringes in optical absorption spectra for thin films has been analyzed in the range of low absorption coefficients and was found to be related to a depth profile of absorbers, e.g., defects. This method has been applied to the subband-gap optical absorption spectra measured by photothermal deflection spectroscopy for hydrogenated amorphous silicon thin films. It is shown that the analysis of interference fringes provides unique information about surface and interface defects in this material.
Journal of Applied Physics is copyrighted by The American Institute of Physics.
| History: | Received 19 April 1991; accepted 15 July 1991 |
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KEYWORDS and PACS
THIN FILMS,
AMORPHOUS SEMICONDUCTORS,
SILICON,
ABSORPTION SPECTRA,
DEFECTS,
SPATIAL DISTRIBUTION,
DEPTH PROFILES,
INTERFERENCE,
HYDROGENATION
- 78.50.Ge
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Impurity and defect absorption in solids Semiconductors - 78.65.Gb
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of thin films, surfaces, and thin layer structures (including superlattices, heterostructures, and intercalation compounds) Other inorganics - 42.10.Jd
Optics Propagation and transmission in homogeneous media Interference - 42.10.Ke
Optics Propagation and transmission in homogeneous media Absorption - YEAR: 1990-91
RELATED DATABASES
PUBLICATION DATA
0021-8979 (print)
1089-7550 (online)
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