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Theoretical analysis of the static deflection of plates for atomic force microscope applications

J. Appl. Phys. 74, 1 (1993); doi:10.1063/1.354137

Issue Date: 1 July 1993

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John Elie Sader and Lee White
Department of Mathematics, University of Melbourne, Parkville, 3052 Victoria, Australia
The analysis of the static deflection of cantilever plates is of fundamental importance in application to the atomic force microscope (AFM). In this paper we present a detailed theoretical study of the deflection of such cantilevers. This shall incorporate the presentation of approximate analytical methods applicable in the analysis of arbitrary cantilevers, and a discussion of their limitations and accuracies. Furthermore, we present results of a detailed finite element analysis for a current AFM cantilever, which will be of value to the users of the AFM. Journal of Applied Physics is copyrighted by The American Institute of Physics.
History: Received 25 January 1993; accepted 8 March 1993
Permalink: http://link.aip.org/link/?JAPIAU/74/1/1
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KEYWORDS and PACS

Keywords
PACS
  • 07.80.+x
    Specific instrumentation and techniques of general use in physics Electron and ion microscopes and spectrometers; techniques
  • YEAR: 1993

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PUBLICATION DATA

ISSN:
0021-8979 (print)   1089-7550 (online)
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REFERENCES (12)

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