Theoretical analysis of the static deflection of plates for atomic force microscope applications
J. Appl. Phys. 74, 1 (1993); doi:10.1063/1.354137
Issue Date: 1 July 1993
You are not logged in to this journal. Log in
The analysis of the static deflection of cantilever plates is of fundamental importance in application to the atomic force microscope (AFM). In this paper we present a detailed theoretical study of the deflection of such cantilevers. This shall incorporate the presentation of approximate analytical methods applicable in the analysis of arbitrary cantilevers, and a discussion of their limitations and accuracies. Furthermore, we present results of a detailed finite element analysis for a current AFM cantilever, which will be of value to the users of the AFM.
Journal of Applied Physics is copyrighted by The American Institute of Physics.
| History: | Received 25 January 1993; accepted 8 March 1993 |
| Permalink: |
http://link.aip.org/link/?JAPIAU/74/1/1 |
KEYWORDS and PACS
ATOMIC FORCE MICROSCOPY,
DEFLECTION,
ACCURACY,
LIMITING VALUES,
FINITE ELEMENT METHOD,
PLATES,
EQUATIONS
- 07.80.+x
Specific instrumentation and techniques of general use in physics Electron and ion microscopes and spectrometers; techniques - YEAR: 1993
RELATED DATABASES
PUBLICATION DATA
0021-8979 (print)
1089-7550 (online)
REFERENCES (12)
For access to fully linked references, you need to log in.
For access to fully linked references, you need to Log in.
- E. H. Mansfield, The Bending and Stretching of Plates (Pergamon, Oxford, 1964).
- S. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells (McGraw-Hill, New York, 1959).
- L. D. Landau and E. M. Lifshitz, Theory of Elasticity (Pergamon, Oxford, 1970).
- M. Levy, C. R. Acad. Sci. 129, 535 (1899).
- T. J. Jaramillo,
J. Appl. Mechan. 17, 67 (1950 ). - PAFEC is a trademark of, and is available from PAFEC Ltd, Strelley Hall, Main Street, Strelley, Nottingham, NG8 6PE.
- E. Reissner and M. Stein, N.A.C.A. Tech. Note. No. 2369 (June 1951).
- T. R. Albrecht, S. Akamine, T. E. Carver, and C. F. Quate,
J. Vac. Sci. Technol. A 8, 3386 (1990 ). - V. I. Smirnov, A Course of Higher Mathematics (Pergamon, Oxford, 1964), Vol. 4.
- R. W. Hornbeck,Numerical Methods (Quantum, New York, 1975).
- S. M. Roberts and J. S. Shipman, Two-Point Boundary Value Problems: Shooting Methods (Elsevier, New York, 1972).
- C. Drummond (personal communication).






