Heat generation in semiconductor devices
J. Appl. Phys. 75, 942 (1994); doi:10.1063/1.356450
Issue Date: 15 January 1994
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A general and practical model for heat generation that can be used in the heat conduction equation for nonisothermal semiconductor device simulations is presented. The model is developed for cubic semiconductors with position-dependent, multivalley, and multiband band structures, Fermi-Dirac statistics and an accurate treatment of electron-hole scattering. Starting from the Boltzmann transport equations for electrons, holes, and phonons, an internal energy balance equation, consistent with basic thermodynamic principles, is derived. By applying the linear phenomenological equations of irreversible thermodynamics and Onsager's relations, the energy balance equation is reformulated into a heat conduction equation, and a heat generation source term is identified. The Peltier coefficients appearing in the model are analyzed, and thermal boundary conditions are given. The influence from optical effects, in particular photon reabsorption, is also discussed. Finally, physical insight into the mechanisms governing heat generation in semiconductor devices is obtained by an interpretation of the various contributions to the heat generation source term.
Journal of Applied Physics is copyrighted by The American Institute of Physics.
| History: | Received 24 September 1992; accepted 4 October 1993 |
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http://link.aip.org/link/?JAPIAU/75/942/1 |
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0021-8979 (print)
1089-7550 (online)
REFERENCES (28)
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- S. P. Gaur and D. H. Navon,
IEEE Trans. Electron Devices ED-23, 50 (1976 ). - M. S. Adler, IEEE Trans. Electron Devices ED-25, 16 (1978).
- A. Chryssafis and W. Love,
Solid State Electron. 22, 249 (1979 ). - S. Selberherr, Analysis and Simulation of Semiconductor Devices (Springer, Wien, 1984).
- G. Wachutka, in Simulation of Semiconductor Devices and Processes, edited by G. Baccarani and M. Rudan (Tecnoprint, Bologna, 1988), Vol. 3, p. 83.
- G. Wachutka, in Proceedings of the Sixth International NASECODE Conference, edited by J. J. H. Miller (Boole, Dublin, Ireland, 1989), p. 409.
- aG. Wachutka,
IEEE Trans. Computer-Aided Design 9, 1141 (1990 ). - bS. Rudin, G. Wachutka, and H. Baltes, Sensors and Actuators A 25–27, 731 (1991).
- CG. Wachutka,
COMPEL 10, No. 4, 311 (1991 ). - H. Goldstein, Classical Mechanics, 6th ed. (Addison-Wesley, Reading, MA, 1969).
- F. Reif, Fundamentals of Statistical and Thermal Physics (McGraw-Hill, New York, 1965).
- A. C Smith, J. F. Janak, and R. B. Adler, Electronic Conduction in Solids (McGraw-Hill, New York, 1967).
- M. L. Cohen and T. K. Bergstresser,
Phys. Rev. 141, 789 (1966 ). - T. C Harman and J. M. Honig, Thermoelectric and Thermomagnetic Effects and Applications (McGraw-Hill, New York, 1967).
- A. H. Marshak and C. M. van Vliet,
Solid-State Electron. 21, 417 (1978 ). - A. H. Marshak and C. M. van Vliet,
Proc. IEEE 72, 148 (1984 ). - N. W. Ashcroft and N. D. Mermin, Solid State Physics (Holt-Saunders, Japan, 1981).
- H. B. Callen, Thermodynamics (Wiley, New York, 1960).
- P. G. Klemens, Solid State Physics, edited by F. Seitz and D. Turnbull (Academic, New York, 1958), Vol. 7, p. 1.
- E. M. Conwell, Solid State Physics, edited by F. Seitz, D. Turnbull, and H. Ehrenreich (Academic, New York, 1967), Suppl. 9.
- E. Vehnre, Periodica Polytechnica Ser. El. Eng. 33/3, 141 (1989).
- T. T. Mnatsakanov,
Phys. Status Solidi B 143, 225 (1987 ). - D. E. Kane and R. M. Swanson (private communication). •*
- U. Lindefelt, J. Appl. Phys. 75, 958 (1994).
- V. C. Aguilera-Navarro, G. A. Estévez, and A. Kostecki, J. Appl. Phys. 63, 2848 (1988).
- M. Jacobs, Heat Transfer (Wiley, New York, 1949).
- P. J. Schneider, Handbook of Heat Transfer, edited by W. M. Rohsenow and J. P. Hartnet (McGraw-Hill, New York, 1973).
- According to an alternative view, the electrons in the high-energy tail of the distribution function can be regarded as having enough energy to diffuse classically from the n side to the p side. In order to replenish the high-energy tail, electrons of lower energy are promoted to higher en ergy. The energy so required is obtained from phonon absorption.
- C. Kittel, Introduction to Solid State Physics, 5th ed. (Wiley, New York, 1976), p. 237.
- E. A. Guggenheim, Thermodynamics, 3rd ed. (North-Holland, Amster dam, 1957).







