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Optimal control of ultrasoft cantilevers for force microscopy

J. Appl. Phys. 83, 3972 (1998); doi:10.1063/1.367152

Issue Date: 15 April 1998

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K. J. Bruland, J. L. Garbini, and W. M. Dougherty
Department of Mechanical Engineering, University of Washington, Seattle, Washington 98195

J. A. Sidles
Department of Orthopaedics, University of Washington, Seattle, Washington 98195
The goals of optimal control in force microscopy are: (1) to obtain favorable cantilever dynamic properties and (2) to control the cantilever to a desired amplitude, while (3) exerting as little control force as possible, and (4) preserving the force signal-to-noise ratio of the uncontrolled cantilever. This article describes the experimental implementation of an optimal controller that achieves these goals. The application of this controller to an ultrasoft cantilever with spring constant of 110 µN/m at 10 K reduced the resonant quality from 15 000 to 220, reduced the Brownian amplitude from 11.2 Å to 1.4 Å, used less than 7 × 10–17 N of control effort, left the force sensitivity unaltered at 9.8 × 10–18 N/sqrt( Hz), and demonstrated feedback control can force cantilever motion to track a reference input. ©1998 American Institute of Physics.
History: Received 17 December 1997; accepted 16 January 1998
Permalink: http://link.aip.org/link/?JAPIAU/83/3972/1
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KEYWORDS and PACS

Keywords
PACS
  • 07.79.Lh
    Instruments, apparatus, components, and techniques common to several branches of physics and astronomy Scanning probe microscopes, components, and techniques Atomic force microscopes
  • 07.05.Dz
    Instruments, apparatus, components, and techniques common to several branches of physics and astronomy Computers in experimental physics Control systems
  • YEAR: 1998

PUBLICATION DATA

ISSN:
0021-8979 (print)   1089-7550 (online)
Publisher:
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REFERENCES (17)
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  1. E. Meyer, Surf. Sci. 41, 3 (1992).
  2. P. Grutter, MSA Bull. 24, 416 (1994).
  3. J. A. Sidles, J. L. Garbini, K. J. Bruland, D. Rugar, O. Züger, S. Hoen, and C. S. Yannoni, Rev. Mod. Phys. 67, 249 (1995).
  4. J. A. Sidles and D. Rugar, Phys. Rev. Lett. 70, 3506 (1993).
  5. For analytic expressions the convention of two sided power spectrum S<sub>x</sub><sup>th</sup>(omega) is adopted, with a transform pair defined as

    [dformula S[sub x][sup th](omega) = [integral][sub -[infinity]][sup +[infinity]]R[sub x](tau)e[sup -j omega tau] d tau,]

    [dformula R[sub x](tau) = (1/(2 pi))[integral][sub -[infinity]][sup +[infinity]]S[sub x][sup th](omega)e[sup j omega tau] d omega,]

    where Rx(tau) = E[x(t)x(t + tau)]. Numerical values are presented as one sided spectra S<sub>x</sub><sup>exp</sup>(omega) = 2S<sub>x</sub><sup>th</sup>(omega) that are read from standard laboratory instruments.

  6. J. L. Garbini, K. J. Bruland, W. M. Dougherty, and J. A. Sidles, J. Appl. Phys. 80, 1951 (1996).
  7. K. J. Bruland, J. L. Garbini, W. M. Dougherty, and J. A. Sidles, J. Appl. Phys. 80, 1959 (1996).
  8. K. J. Bruland, Dissertation, University of Washington, 1997.
  9. J. Mertz, O. Marti, and J. Mlynek, Appl. Phys. Lett. 62, 2344 (1993).
  10. C. H. Liu, J. K. Reynolds, A. Partridge, T. W. Kenny, L. M. Miller, J. A. Podosek, H. K. Rockstad, and W. J. Kaiser, in Proceedings of the ASME Dynamic Systems and Control Division, 1995, DSC-Vol. 57-2, p. 1001.
  11. Janis Research Company, Wilmington, MA.
  12. Microlever Type C from Park Scientific Instruments, Sunnyvale, CA.
  13. R. M. Meyer, M. Traxler, J. A. Sidles, J. L. Garbini, W. M. Dougherty, and K. J. Bruland (unpublished).
  14. J. L. Hutter and J. Bechhoefer, Rev. Sci. Instrum. 64, 1868 (1993).
  15. D. Rugar, H. J. Mamin, and P. Guethner, Appl. Phys. Lett. 55, 2588 (1989).
  16. D. Rugar, H. J. Mamin, R. Erlandsson, J. E. Stern, and B. D. Terris, Rev. Sci. Instrum. 59, 2337 (1988).
  17. C110 SmCo5 powder from Arnold Engineering, Marengo, IL.

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