Surface stress induced deflections of cantilever plates with applications to the atomic force microscope: Rectangular plates
J. Appl. Phys. 89, 2911 (2001); doi:10.1063/1.1342018
Issue Date: 1 March 2001
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Surface stress is a material property that underpins many physical processes, such as the formation of self-assembled monolayers and the deposition of metal coatings. Due to its extreme sensitivity, atomic force microscopy (AFM) has recently emerged as an important tool in the measurement of surface stress. Fundamental to this application is theoretical knowledge of the effects of surface stress on the deflections of AFM cantilever plates. In this article, a detailed theoretical study of the effects of surface stress on the deflections of rectangular AFM cantilever plates is given. This incorporates the presentation of rigorous finite element results and approximate analytical formulas, together with a discussion of their limitations and accuracies. In so doing, we assess the validity of Stoney's equation, which is commonly used to predict the deflections of these cantilevers, and present new analytical formulas that greatly improve upon its accuracy. ©2001 American Institute of Physics.
| History: | Received 19 June 2000; accepted 20 November 2000 |
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KEYWORDS and PACS
- 68.37.Ps
Surfaces and interfaces; thin films and low-dimensional systems (structure and nonelectronic properties) Microscopy of surfaces, interfaces, and thin films Atomic force microscopy (AFM) - 07.79.Lh
Instruments, apparatus, and components common to several branches of physics and astronomy Scanning probe microscopes and components Atomic force microscopes - 02.70.Dh
Mathematical methods in physics Computational techniques Finite-element and Galerkin methods - YEAR: 2001
RELATED DATABASES
PUBLICATION DATA
0021-8979 (print)
1089-7550 (online)
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