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Microstructural properties of (Ba, Sr)TiO3 films fabricated from BaF2/SrF2/TiO2 amorphous multilayers using the combinatorial precursor method

J. Appl. Phys. 90, 2474 (2001); doi:10.1063/1.1388563

Issue Date: 1 September 2001

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I. Takeuchi, K. Chang, and R. P. Sharma
Small Smart Systems Center, Department of Materials Science and Engineering and Center for Superconductivity Research, Department of Physics, University of Maryland, College Park, Maryland 20742-2115

L. A. Bendersky
National Institute of Standards and Technology, Gaithersburg, Maryland

H. Chang, X.-D. Xiang, E. A. Stach, and C.-Y. Song
Lawrence Berkeley National Laboratory, Berkeley, California
We have investigated the microstructure of (Ba, Sr)TiO3 films fabricated from BaF2/SrF2/TiO2 amorphous multilayers. Rutherford backscattering spectroscopy and x-ray diffraction studies show that a controlled thermal treatment can interdiffuse the multilayers so as to create predominantly single-phase epitaxial (Ba, Sr)TiO3 films. A high resolution cross-sectional transmission electron microscopy investigation of the processed films shows that they consist of large epitaxial grains of (Ba, Sr)TiO3 with atomically sharp interfaces with the LaAlO3 substrates. In addition, we have identified regions where polycrystalline and transient phases exist in small pockets in the film matrix. The results here indicate that the combinatorial thin-film synthesis using precursors can produce (Ba, Sr)TiO3 films in combinatorial libraries which exhibit properties similar to those films made by conventional techniques. ©2001 American Institute of Physics.
History: Received 8 December 2000; accepted 29 May 2001
Permalink: http://link.aip.org/link/?JAPIAU/90/2474/1
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KEYWORDS and PACS

Keywords
PACS
  • 81.15.Np
    Materials science Methods of deposition of films and coatings; film growth and epitaxy Solid phase epitaxy; growth from solid phases
  • 77.84.Dy
    Dielectrics, piezoelectrics, and ferroelectrics and their properties Dielectric, piezoelectric, ferroelectric, and antiferroelectric materials Niobates, titanates, tantalates, PZT ceramics, etc.
  • 68.55.Ac
    Surfaces and interfaces; thin films and low-dimensional systems (structure and nonelectronic properties) Thin film structure and morphology Nucleation and growth: microscopic aspects
  • 61.72.-y
    Structure of solids and liquids; crystallography Defects and impurities in crystals; microstructure
  • 66.30.Ny
    Transport properties of condensed matter (nonelectronic) Diffusion in solids Chemical interdiffusion; diffusion barriers
  • 68.35.Fx
    Surfaces and interfaces; thin films and low-dimensional systems (structure and nonelectronic properties) Solid surfaces and solid-solid interfaces: Structure and energetics Diffusion; interface formation
  • 68.35.Ct
    Surfaces and interfaces; thin films and low-dimensional systems (structure and nonelectronic properties) Solid surfaces and solid-solid interfaces: Structure and energetics Interface structure and roughness
  • YEAR: 2001

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PUBLICATION DATA

ISSN:
0021-8979 (print)   1089-7550 (online)
Publisher:
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REFERENCES (13)
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