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Electron energy deposition in an electron-beam pumped KrF amplifier: Impact of beam power and energy

J. Appl. Phys. 91, 2662 (2002); doi:10.1063/1.1448409

Issue Date: 1 March 2002

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G. M. Petrov
Berkeley Scholars, Incorporated, P.O. Box 852, Springfield, Virginia 22150

J. L. Giuliani and A. Dasgupta
Plasma Physics Division, Naval Research Laboratory, Washington, DC 20375
The electron deposition in an Ar–Kr–F2 mixture, based on a solution of the electron Boltzmann equation, is presented. The model is relevant to an electron-beam generated KrF* laser amplifier at atmospheric pressure. Sets of cross sections for Ar, Kr, and F2 have been compiled. Calculations have been performed to determine the electron energy distribution function, energy per electron–ion pair and the ionization and excitation rates. It is found that the inclusion of inner shell ionization and the subsequent Auger emission are essential for matching known results on both the energy per electron–ion pair [script W]ei and the stopping power in pure Ar or Kr target gases. For the chosen Ar–Kr–F2 mixture, [script W]ei is calculated to be 24.6 eV. The excitation-to-ionization ratio is calculated to be 0.38 for Ar and 0.54 for Kr at low input power density Pbeam (1 kW/cm3). Both ratios increase with Pbeam, particularly for Kr which attains 0.8 at 1 MW/cm3. The dependency on Pbeam and the excitation efficiency for Kr is significantly higher than previously assumed in KrF* kinetic models. Results are also compared with the continuous slowing down approximation to demonstrate that this approach is limited to the regime of low power deposition. ©2002 American Institute of Physics.
History: Received 6 July 2001; accepted 10 December 2001
Permalink: http://link.aip.org/link/?JAPIAU/91/2662/1
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KEYWORDS and PACS

Keywords
PACS
  • 42.55.Lt
    Optics Lasers Gas lasers including excimer and metal-vapor lasers
  • 42.60.By
    Optics Laser optical systems: design and operation Design of specific laser systems
  • 34.50.Gb
    Atomic and molecular collision processes and interactions Scattering of atoms and molecules Electronic excitation and ionization of molecules; intermediate molecular states (including lifetimes, state mixing, etc.)
  • 33.80.Eh
    Molecular properties and interactions with photons Photon interactions with molecules Autoionization, photoionization, and photodetachment
  • 34.50.Bw
    Atomic and molecular collision processes and interactions Scattering of atoms and molecules Energy loss and stopping power
  • YEAR: 2002

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ISSN:
0021-8979 (print)   1089-7550 (online)
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REFERENCES (66)

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  1. L. A. Rosocha and K. B. Riepe, Fusion Technol. 11, 576 (1987).
  2. J. D. Sethian, C. J. Pawley, S. P. Obenschain, K. A. Gerber, V. Serlin, C. A. Sullivan, T. Lehecka, W. D. Webster, M. W. McGeoch, I. D. Smith, P. A. Corcoran, and R. A. Altes, IEEE Trans. Plasma Sci. 25, 221 (1997).
  3. J. D. Sethian, S. P. Obenschain, K. A. Gerber, C. J. Pawley, V. Serlin, C. A. Sullivan, W. D. Webster, A. V. Deniz, T. Lehecka, M. W. McGeoch, R. A. Altes, P. A. Corcoran, I. D. Smith, and O. C. Barr, Rev. Sci. Instrum. 68, 2357 (1997).
  4. J. D. Sethian, M. Meyers, I. D. Smith, V. Carboni, J. Kishi, D. Morton, J. Pearce, B. Bowen, L. Schlitt, O. Barr, and W. Webster, IEEE Trans. Plasma Sci. 28, 1333 (2000).
  5. A. Suda, M. Obara, and A. Noguchi, Fusion Technol. 11, 548 (1987).
  6. M. W. McGeoch, P. A. Corcoran, R. G. Altes, I. D. Smith, S. E. Bodner, R. H. Lehmberg, S. P. Obenschain, and J. D. Sethian, Fusion Technol. 32, 610 (1997).
  7. W. L. Morgan and A. Szöke, Phys. Rev. A 23, 1256 (1981).
  8. A. Mandl, D. Klimek, and J. H. Parks, J. Appl. Phys. 55, 3940 (1984).
  9. F. Kannari, M. Obara, and T. Fujioka, J. Appl. Phys. 57, 4309 (1985).
  10. S. J. Czuchlewski, D. E. Hanson, B. J. Krohn, and A. R. Larson, Fusion Technol. 11, 560 (1987).
  11. M. W. McGeoch in Naval Research Laboratory, Report No. NRL/PU/6730-94-264, 1994 (unpublished).
  12. G. N. Whyte, Radiat. Res. 18, 265 (1963).
  13. L. G. Christophorou, Atomic and Molecular Radiation Physics (Wiley, London, 1971), p. 35.
  14. L. R. Peterson and J. E. Allen, Jr., J. Chem. Phys. 56, 6068 (1972).
  15. L. R. Peterson, Phys. Rev. 187, 105 (1969).
  16. L. R. Peterson, T. Sawada, J. N. Bass, and A. E. S. Green, Comput. Phys. Commun. 5, 239 (1973).
  17. M. J. Berger and S. M. Seltzer, NASA Report No. SP-3012 (1964).
  18. D. C. Lorents, Physica C 82, 19 (1976).
  19. J. Bretagne, G. Delouya, J. Godart, and V. Puech, J. Phys. D 14, 1225 (1981).
  20. A. E. S. Green and T. Sawada, J. Atmos. Terr. Phys. 34, 1719 (1972).
  21. D. A. Vroom, R. L. Palmer, and J. Wm. Mc Gowan, J. Chem. Phys. 66, 647 (1977).
  22. H. C. Straub, P. Renault, B. G. Lindsay, K. A. Smith, and R. F. Stebbings, Phys. Rev. A 52, 1115 (1995).
  23. Dayashankar, Physica C 111, 134 (1981).
  24. Dayashankar, M. A. Prasad, and K. Unnikrishnan, Phys. Lett. A 90, 402 (1982).
  25. C. J. Elliott and A. E. Greene, J. Appl. Phys. 47, 2946 (1976).
  26. J. E. Chilton, J. B. Boffard, R. S. Schappe, and C. C. Lin, Phys. Rev. A 57, 267 (1998).
  27. J. E. Chilton, M. D. Stewart, Jr., and C. C. Lin, Phys. Rev. A 62, 032714 (2000).
  28. A. Dasgupta, M. Blaha, and J. L. Giuliani, Phys. Rev. A 61, 012703 (1999).
  29. D. R. Suhre and J. T. Verdeyen, J. Appl. Phys. 47, 4484 (1976).
  30. J. W. Keto, J. Chem. Phys. 74, 4445 (1981).
  31. F. Kannari and W. D. Kimura, J. Appl. Phys. 64, 500 (1988).
  32. S. P. Slinker, R. D. Taylor, and A. W. Ali, J. Appl. Phys. 63, 1 (1988).
  33. S. P. Slinker, A. W. Ali, and R. D. Taylor, J. Appl. Phys. 67, 679 (1990).
  34. I. P. Shkarofsky, T. W. Johnston, and M. P. Bachynski, The Particle Kinetics of Plasmas (Addison–Wesley, Reading, MA, 1966), p. 258.
  35. S. C. Soong, Radiat. Res. 67, 187 (1976).
  36. D. Loffhagen and R. Winkler, J. Comput. Phys. 112, 91 (1994).
  37. D. Uhrlandt, M. Schmidt, and R. Winkler, Comput. Phys. Commun. 118, 185 (1999).
  38. E. Eggarter, J. Chem. Phys. 62, 833 (1975).
  39. G. M. Petrov and C. M. Ferreira, Internal Report CFP 10/97, Instituto Superior Tcnico, Lisbon Technical University, Portugal.
  40. A. Bogaerts, R. Gijbels, and J. Vlcek, J. Appl. Phys. 84, 121 (1998).
  41. M. Hayashi (private communication).
  42. K. Tachibana, Phys. Rev. A 34, 1007 (1986).
  43. R. S. Schappe, M. B. Schulman, L. W. Anderson, and C. C. Lin, Phys. Rev. A 50, 444 (1994).
  44. N. T. Padial, G. D. Meneses, F. J. da Paixão, and Gy. Csanak, Phys. Rev. A 23, 2194 (1981).
  45. A. Chutjian and D. C. Cartwright, Phys. Rev. A 23, 2178 (1981).
  46. D. H. Madison, C. M. Maloney, and J. B. Wang, J. Phys. B 31, 873 (1998).
  47. J. K. Ballou, C. C. Lin, and F. E. Fajen, Phys. Rev. A 8, 1797 (1973).
  48. I. P. Bogdanova, V. D. Marusin, and V. E. Yakhontova, Opt. Spektrosk. 44, 368 (1978).
  49. J. E. Chilton and C. C. Lin, Phys. Rev. A 60, 3712 (1999).
  50. H. W. Drawin, Z. Phys. 225, 483 (1969).
  51. I. I. Sobelman, L. A. Vainstein, and E. A. Yukov, Excitation of Atoms and Broadening of Spectral Lines (Springer, Berlin, 1981), p. 206.
  52. C. M. Lee and K. T. Lu, Phys. Rev. A 8, 1241 (1973).
  53. S. K. Srivastava, H. Tanaka, A. Chutjian, and S. Trajmar, Phys. Rev. A 23, 2156 (1981).
  54. C. B. Opal, E. C. Beaty, and W. K. Peterson, At. Data 4, 209 (1972).
  55. D. Rapp and P. Englander-Golden, J. Chem. Phys. 43, 1464 (1965).
  56. R. S. Freund, R. C. Wetzel, R. J. Shul, and T. R. Hayes, Phys. Rev. A 41, 3575 (1990).
  57. E. J. McGuire, Phys. Rev. A 16, 73 (1977).
  58. H. Date, Y. Sakai, and H. Tagashira, J. Phys. D 22, 1478 (1989).
  59. S. Trajmar, S. K. Srivastava, H. Tanaka, and H. Nishimura, Phys. Rev. A 23, 2167 (1981).
  60. G. D. Meneses, F. J. da Paixão, and N. T. Padial, Phys. Rev. A 32, 156 (1985).
  61. I. P. Bogdanova and S. V. Yurgenson, Opt. Spektrosk. 62, 428 (1987).
  62. S. Kaur, S. Srivastava, R. P. McEachran, and A. D. Stauffer, J. Phys. B 31, 4833 (1988).
  63. A. Dasgupta, K. Bartschat, D. Vaid, A. N. Gram-Grzhimailo, D. H. Madison, M. Blaha, and J. L. Giuliani Phys. Rev. E 64, 052710 (2001).
  64. A. Delâge and J-D Carette, J. Phys. B 9, 2399 (1976).
  65. M. Hayashi and T. Nimura, J. Appl. Phys. 54, 4879 (1983).
  66. W. L. Morgan, Plasma Chem. Plasma Process. 12, 449 (1992).

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