Nonresonant detection of terahertz radiation in field effect transistors
We present an experimental and theoretical study of nonresonant detection of subterahertz radiation in GaAs/AlGaAs and GaN/AlGaN heterostructure field effect transistors. The experiments were performe...
We present an experimental and theoretical study of nonresonant detection of subterahertz radiation in GaAs/AlGaAs and GaN/AlGaN heterostructure field effect transistors. The experiments were performe...
Structure-sensitive oxidation of the indium phosphide (001) surface
The oxidation of anion- and cation-rich indium phosphide (001) has been investigated by exposure to unexcited molecular oxygen. Indium phosphide oxidation is an activated process and strongly structur...
The oxidation of anion- and cation-rich indium phosphide (001) has been investigated by exposure to unexcited molecular oxygen. Indium phosphide oxidation is an activated process and strongly structur...
Surface stress induced deflections of cantilever plates with applications to the atomic force microscope: V-shaped plates
J. Appl. Phys. 91, 9354 (2002); doi:10.1063/1.1470240
Issue Date: 1 June 2002
You are not logged in to this journal. Log in
Surface stress measurements using atomic force microscopy (AFM) require theoretical knowledge of the surface stress induced deformation of AFM cantilever plates. In a companion paper [J. E. Sader, J. Appl. Phys. 89, 2911 (2001)], a detailed theoretical study of the effects of homogeneous surface stress on rectangular AFM cantilever plates was presented. Since cantilevers of both rectangular and V-shaped geometries are used widely in practice, a corresponding theoretical study for V-shaped cantilevers is presented here. In line with the companion study, an assessment of Stoney's equation is given, together with the presentation of greatly improved analytical formulas and rigorous finite element results. ©2002 American Institute of Physics.
| History: | Received 15 October 2001; accepted 25 February 2002 |
| Permalink: |
http://link.aip.org/link/?JAPIAU/91/9354/1 |
| BUY THIS ARTICLE | (US$28) |
|
|
|
|
Connotea
CiteULike
del.icio.us
BibSonomy
KEYWORDS and PACS
- 07.79.Lh
Instruments, apparatus, and components common to several branches of physics and astronomy Scanning probe microscopes and components Atomic force microscopes - 02.70.Dh
Mathematical methods in physics Computational techniques Finite-element and Galerkin methods - 07.10.Pz
Instruments, apparatus, and components common to several branches of physics and astronomy Mechanical instruments and equipment Instruments for strain, force, and torque - YEAR: 2002
RELATED DATABASES
PUBLICATION DATA
0021-8979 (print)
1089-7550 (online)
AIP
REFERENCES (16)
For access to fully linked references, you need to log in.
For access to fully linked references, you need to Log in.
- G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).
- D. Sarid, Scanning Force Microscopy: With Applications to Electric, Magnetic, and Atomic Forces (Oxford University Press, New York, 1994).
- L. A. Bottomley, J. E. Coury, and P. N. First,
Anal. Chem. 68, 185R (1996) . - B. Cappella and G. Dietler,
Surf. Sci. Rep. 34, 1 (1999) . - P. T. Lillehei and L. A. Bottomley,
Anal. Chem. 72, 189R (2000) . - R. Berger, E. Delamarche, H. P. Lang, C. Gerber, J. K. Gimzewski, E. Meyer, and H. J. Guntherodt,
Science 276, 2021 (1997) . - R. Raiteri and H. J. Butt,
J. Phys. Chem. 99, 15728 (1995) . - H. J. Butt,
J. Colloid Interface Sci. 180, 251 (1996) . - T. A. Brunt, T. Rayment, S. J. O'Shea, and M. E. Welland,
Langmuir 12, 5942 (1996) . - G. G. Stoney,
Proc. R. Soc. London, Ser. A 82, 172 (1909) ;
Stoney originally considered the case of uniaxial stress, which was later corrected to account for isotropic and homogeneous surface stresses. - J. E. Sader, J. Appl. Phys. 89, 2911 (2001).
- S. Timoshenko and J. N. Goodier, Theory of Elasticity (McGraw-Hill, New York, 1951).
- J. N. Reddy, Theory and Analysis of Elastic Plates (Taylor and Francis, Philadelphia, PA, 1999).
- Maximum deflections exhibited in practice are typically far smaller than the thickness of the plate.
- In the limit as d/b approaches 0.5, the free edges between the two arms of the cantilever collapse to a single point (x = 0; y = 0). This free edge condition does not affect the plate deformation, except for the curvature immediately at this point. Hence, the deformation away from this point is identical to that of a triangular plate with the entire edge (x = 0) rigidly clamped. Behavior at the point (x = 0; y = 0) is not required in surface stress measurements, and is therefore not considered here.
- LUSAS is a trademark of, and is available from FEA Ltd. Forge House, 66 High Street, Kingston Upon Thames, Surrey, KT1 1HN, U.K. Quadrilateral elements were used along the skewed rectangular arms of the cantilever, and triangular elements were used near the end tip. Thin plate elements with linear interpolation were used throughout.
