Initial growth stages of epitaxial BaTiO3 films on vicinal SrTiO3 (001) substrate surfaces
J. Appl. Phys. 91, 10157 (2002); doi:10.1063/1.1478800
Issue Date: 15 June 2002
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The initial growth mechanism of epitaxial BaTiO3 films is studied by combined application of atomic force microscopy, cross sectional high-resolution transmission electron microscopy, and x-ray diffraction. Epitaxial BaTiO3 thin films were grown by pulsed laser deposition on vicinal Nb-doped SrTiO3 (SrTiO3:Nb) (001) substrates with well-defined terraces. X-ray diffraction and cross sectional high-resolution transmission electron microscopy investigations revealed well-defined epitaxial films and a sharp interface between BaTiO3 films and SrTiO3:Nb substrates. The layer-then-island (StranskiKrastanov mode) growth mechanism observed by analyzing the morphology of a sequence of films with increasing amount of deposited material has been confirmed by microstructure investigations. ©2002 American Institute of Physics.
| History: | Received 27 December 2001; accepted 23 March 2002 |
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http://link.aip.org/link/?JAPIAU/91/10157/1 |
KEYWORDS and PACS
barium compounds,
dielectric thin films,
epitaxial layers,
pulsed laser deposition,
vapour phase epitaxial growth,
atomic force microscopy,
transmission electron microscopy,
X-ray diffraction
- 81.15.Fg
Materials science Methods of deposition of films and coatings; film growth and epitaxy Laser deposition - 68.37.Ps
Surfaces and interfaces; thin films and low-dimensional systems (structure and nonelectronic properties) Microscopy of surfaces, interfaces, and thin films Atomic force microscopy (AFM) - 68.37.Lp
Surfaces and interfaces; thin films and low-dimensional systems (structure and nonelectronic properties) Microscopy of surfaces, interfaces, and thin films Transmission electron microscopy (TEM) (including STEM, HRTEM, etc.) - 68.55.Jk
Surfaces and interfaces; thin films and low-dimensional systems (structure and nonelectronic properties) Thin film structure and morphology Structure and morphology; thickness; crystalline orientation and texture - YEAR: 2002
RELATED DATABASES
PUBLICATION DATA
0021-8979 (print)
1089-7550 (online)
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