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Fabrication of photonic band gap crystal using microtransfer molded templates

J. Appl. Phys. 93, 5866 (2003); doi:10.1063/1.1568548

Issue Date: 15 May 2003

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W. Y. Leung
Microelectronics Research Center and Ames Laboratory USDOE, Iowa State University, Ames, Iowa 50011

H. Kang, K. Constant, and D. Cann
Department of Material Science and Engineering, Iowa State University, Ames, Iowa 50011

C.-H. Kim
Department of Physics and Astronomy, Iowa State University, Ames, Iowa 50011

R. Biswas
Microelectronic Research Center and Ames Laboratory USDOE and Department of Physics and Astronomy, Iowa State University, Ames, Iowa 50011

M. M. Sigalas
Agilent Laboratory, 3500 Deer Creek Road, Palo Alto, California 94304

K.-M. Ho
Microelectronics Research Center and Ames Laboratory USDOE and Department of Physics and Astronomy, Iowa State University, Ames, Iowa 50011
We have proposed and demonstrated an economical technique to fabricate a three-dimensional layer-by-layer photonic band gap structure in the infrared wavelengths. An organic polymer template structure, an inverse layer-by-layer photonic crystal structure, is assembled using the microtransfer molding technique. This template is infiltrated with sol-gel or nanoparticle titanium oxide slurry, then later removed by heat treatment at a temperature range of 550–800 °C. This method can be extended to fabricate photonic crystals operating at optical and ultraviolet frequencies. ©2003 American Institute of Physics.
History: Received 20 December 2002; accepted 27 February 2003
Permalink: http://link.aip.org/link/?JAPIAU/93/5866/1
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KEYWORDS and PACS

Keywords
PACS
  • 42.70.Qs
    Photonic bandgap materials
  • 42.86.+b
    Optical workshop techniques
  • YEAR: 2003

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PUBLICATION DATA

ISSN:
0021-8979 (print)   1089-7550 (online)
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REFERENCES (9)
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