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Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems

J. Appl. Phys. 95, 2682 (2004); doi:10.1063/1.1642738

Issue Date: 1 March 2004

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K. L. Ekinci
Aerospace & Mechanical Engineering Department, Boston University, Boston, Massachusetts 02215

Y. T. Yang and M. L. Roukes
Departments of Physics, Applied Physics, and Bioengineering, California Institute of Technology 114-36, Pasadena, California 91125
Nanomechanical resonators can now be realized that achieve fundamental resonance frequencies exceeding 1 GHz, with quality factors (Q) in the range 103<=Q<=105. The minuscule active masses of these devices, in conjunction with their high Qs, translate into unprecedented inertial mass sensitivities. This makes them natural candidates for a variety of mass sensing applications. Here we evaluate the ultimate mass sensitivity limits for nanomechanical resonators operating in vacuo that are imposed by a number of fundamental physical noise processes. Our analyses indicate that nanomechanical resonators offer immense potential for mass sensing—ultimately with resolution at the level of individual molecules. ©2004 American Institute of Physics.
History: Received 17 September 2003; accepted 26 November 2003
Permalink: http://link.aip.org/link/?JAPIAU/95/2682/1
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KEYWORDS and PACS

Keywords
PACS
  • 85.85.+j
    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
  • 07.07.Df
    Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
  • 06.30.Dr
    Mass and density measurement
  • 07.10.Cm
    Micromechanical devices and systems
  • YEAR: 2004

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PUBLICATION DATA

ISSN:
0021-8979 (print)   1089-7550 (online)
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REFERENCES (41)
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