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Transition metal interaction and Ni-Fe-Cu-Si phases in silicon

J. Appl. Phys. 101, 123510 (2007); doi:10.1063/1.2748346

Published 20 June 2007

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M. Heuer, T. Buonassisi, A. A. Istratov, and M. D. Pickett
Department of Materials Science and Engineering, University of California, Berkeley and Materials Science Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720

M. A. Marcus
Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720

A. M. Minor
National Center for Electron Microscopy, Lawrence Berkeley National Laboratory, Berkeley, California 94720

E. R. Weber
Department of Materials Science and Engineering, University of California, Berkeley and Materials Science Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720
In the present article we characterize several intermetallic phases of the Cu-Ni-Fe-Si system found as precipitates in the misfit dislocation layer of intentionally contaminated and slowly cooled Si1−xGex/Si-heterostructures. The clusters showed a characteristic phase speciation into a Cu-rich part similar to Cu3Si and an Fe-Ni-Cu-Si phase similar to NiSi2. It is suggested that the precipitate formation of the investigated intermetallic silicides involves a homogeneous precursor phase at higher temperatures that later decomposes into the observed phases. Our results indicate that chemical reactions between metals and silicon during precipitation may reduce the lattice mismatch compared to single-metal precipitates, rendering mixed-metal-silicide precipitates more stable and energetically favorable. ©2007 American Institute of Physics
History: Received 24 March 2007; accepted 24 April 2007; published 20 June 2007
Permalink: http://link.aip.org/link/?JAPIAU/101/123510/1
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KEYWORDS and PACS

Keywords
PACS
  • 81.30.Mh
    Solid-phase precipitation
  • 64.75.+g
    Solubility, segregation, and mixing; phase separation
  • 61.72.Ff
    Direct observation of dislocations and other defects including etch pits, decoration, electron microscopy, x-ray topography, etc.
  • YEAR: 2007

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PUBLICATION DATA

ISSN:
0021-8979 (print)   1089-7550 (online)
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REFERENCES (14)

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