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Dimensional considerations in achieving large quality factors for resonant silicon cantilevers in air

J. Appl. Phys. 105, 014908 (2009); doi:10.1063/1.3062204

Published 13 January 2009

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Kianoush Naeli and Oliver Brand
School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, USA
This work aims to provide guidelines for designing rectangular silicon cantilever beams to achieve maximum quality factors for the fundamental flexural resonance at atmospheric pressure. The methodology of this work is based on experimental data acquisition of resonance characteristics of silicon cantilevers, combined with modification of analytical damping models to match the captured data. For this purpose, rectangular silicon cantilever beams with thicknesses of 5, 7, 8, 11, and 17  µm and lengths and widths ranging from 70 to 1050  µm and 80 to 230  µm, respectively, have been fabricated and tested. Combining the three dominant damping mechanisms, i.e., the air damping, support loss, and thermoelastic damping, the variation in the measured Q-factors with the cantilever geometrical dimensions is predicted. Also to better describe the experimental data, modified models for air damping have been developed. These modified models can predict the optimum length and thickness of a resonant cantilever to achieve the maximum quality factor at the fundamental flexural resonance mode in air. ©2009 American Institute of Physics
History: Received 21 September 2008; accepted 21 November 2008; published 13 January 2009
Permalink: http://link.aip.org/link/?JAPIAU/105/014908/1
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KEYWORDS and PACS

Keywords
PACS
  • 46.40.Ff
    Resonance, damping and dynamic stability
  • 46.25.Hf
    Thermoelasticity and electromagnetic elasticity
  • YEAR: 2009

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ISSN:
0021-8979 (print)   1089-7550 (online)
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