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High-Q, in-plane modes of nanomechanical resonators operated in air

J. Appl. Phys. 105, 094315 (2009); doi:10.1063/1.3123767

Published 5 May 2009

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Philip S. Waggoner,1 Christine P. Tan,2 Leon Bellan,1 and Harold G. Craighead1
1School of Applied and Engineering Physics, Cornell University, Ithaca, New York 14853, USA
2Department of Biomedical Engineering, Cornell University, Ithaca, New York 14853, USA
Nanomechanical resonators have traditionally been limited to use in vacuum due to low quality factors that come as a result of viscous damping effects in air or liquid. We have fabricated arrays of 90 nm thick trampoline-shaped resonators, studied their resonant frequency spectrum as a function of pressure, and found that some high frequency modes exhibit quality factors over 2000 at atmospheric pressure. We have excited the in-plane resonances of these devices, verified their identities both experimentally and with finite element modeling, and demonstrated their advantageous characteristics for ambient sensing. Even after deposition of a relatively thick polymer layer, the in-plane resonant modes still boast quality factors on the order of 2000. These results show promise for the use of nanomechanical resonant sensors in real-time atmospheric sensing applications. ©2009 American Institute of Physics
History: Received 4 February 2009; accepted 18 March 2009; published 5 May 2009
Permalink: http://link.aip.org/link/?JAPIAU/105/094315/1
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KEYWORDS and PACS

Keywords
PACS
  • 85.85.+j
    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
  • 07.10.Cm
    Micromechanical devices and systems
  • 02.70.Dh
    Finite-element and Galerkin methods
  • YEAR: 2009

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PUBLICATION DATA

ISSN:
0021-8979 (print)   1089-7550 (online)
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  22. See EPAPS Document No. E-JAPIAU-105–056909 for additional figures describing the Q, frequency shift, and figure of merit as a function of pressure for the remaining resonant modes not discussed in detail within the manuscript. For more information on EPAPS, see http://www.aip.org/pubservs/epaps.html. [EPAPS]

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