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Strain relaxation in epitaxial Pt films on (001) SrTiO3

J. Appl. Phys. 106, 043525 (2009); doi:10.1063/1.3207795

Published 31 August 2009

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Junwoo Son, Joël Cagnon, and Susanne Stemmer
Materials Department, University of California, Santa Barbara, California 93106-5050, USA
The relationship between strain relaxation and microstructure evolution of epitaxial, (001)-oriented Pt thin films on (001) SrTiO3 substrates is investigated as a function of Pt film thickness. X-ray diffraction shows that the Pt films gradually relax after film coalescence with increasing film thickness. The Pt film surfaces exhibit a cross-hatched surface pattern that increases in amplitude and density with film thickness and is due to progressive relaxation of the lattice mismatch strain by twinning. The potential of these Pt films as bottom electrodes for functional perovskite films is discussed. ©2009 American Institute of Physics
History: Received 15 July 2009; accepted 22 July 2009; published 31 August 2009
Permalink: http://link.aip.org/link/?JAPIAU/106/043525/1
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KEYWORDS and PACS

Keywords
PACS
  • 68.60.Bs
    Mechanical and acoustical properties of thin films
  • 62.40.+i
    Anelasticity, internal friction, stress relaxation, and mechanical resonances
  • 81.40.Jj
    Elasticity and anelasticity, stress-strain relations
  • 68.55.jd
    Thin film thickness
  • 68.35.bd
    Surface structure of metals and alloys
  • 68.35.Gy
    Mechanical properties and surface strains of solid surfaces and interfaces
  • YEAR: 2009

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0021-8979 (print)   1089-7550 (online)
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