Mechanism of the swift heavy ion induced epitaxial recrystallization in predamaged silicon carbide
J. Appl. Phys. 106, 083516 (2009); doi:10.1063/1.3236627
Published 26 October 2009
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Although silicon carbide has attracted extensive investigations of ion irradiation effects at low energy owing to its potential use in harsh environments, very few works were carried out in the field of ion irradiation at high energy. A recent preliminary study exploring the combination of low and high energy ion irradiation effects in silicon carbide revealed that the damaged layer formed by low energy ion irradiation can undergo an epitaxial recrystallization under subsequent swift heavy ion irradiation. The present paper is devoted to the investigation of the mechanisms at the origin of this phenomenon by performing additional experiments. A detailed analysis of the kinetics of this recrystallization effect demonstrates that the latter cannot be explained by the models proposed for the well-known ion-beam-induced epitaxial crystallization process. Furthermore, it is found that this effect can be accounted for by a mechanism combining the melting within the ion tracks of the amorphous zones through a thermal spike process and their subsequent epitaxial recrystallization initiated from the neighboring crystalline regions wherever the size of the latter surpasses a certain critical value.
©2009 American Institute of Physics
| History: | Received 17 June 2009; accepted 28 August 2009; published 26 October 2009 |
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http://link.aip.org/link/?JAPIAU/106/083516/1 |
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0021-8979 (print)
1089-7550 (online)
REFERENCES (39)
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- J. W. Palmour, H. S. Kong, and R. F. Davies, Appl. Phys. Lett. 51, 2028 (1987).
- J. A. Edmond, K. Das, and R. F. Davis, J. Appl. Phys. 63, 922 (1988).
- K. Shenai, R. S. Scott, and B. J. Baliga,
IEEE Trans. Electron Devices 36, 1811 (1989) . - H. Morkoç, S. Strite, G. B. Gao, M. E. Lin, B. Sverdlov, and M. Burns, J. Appl. Phys. 76, 1363 (1994).
- C. J. McHargue and J. M. Williams,
Nucl. Instrum. Methods Phys. Res. B 80-81, 889 (1993) . - A. Heft, E. Wendler, T. Bachmann, E. Glaser, and W. Wesch,
Mater. Sci. Eng., B 29, 142 (1995) . - S. J. Zinkle and L. L. Snead,
Nucl. Instrum. Methods Phys. Res. B 116, 92 (1996) . - E. Wendler, A. Heft, and W. Wesch,
Nucl. Instrum. Methods Phys. Res. B 141, 105 (1998) . - W. J. Weber, L. M. Wang, N. Yu, and N. J. Hess,
Mater. Sci. Eng., A 253, 62 (1998) . - L. Csepregi, E. F. Kennedy, S. S. Lau, J. W. Mayer, and T. W. Sigmon, Appl. Phys. Lett. 29, 645 (1976).
- H. G. Bohn, J. M. Williams, C. J. McHargue, and G. M. Begun,
J. Mater. Res. 2, 107 (1987) . - V. Heera, J. Stoemenos, R. Kögler, and W. Skorupa, J. Appl. Phys. 77, 2999 (1995).
- V. Heera, R. Kögler, W. Skorupa, and J. Stoemenos, Appl. Phys. Lett. 67, 1999 (1995).
- L. H. Ford, N. S. Hibbert, and D. G. Martin,
J. Nucl. Mater. 45, 139 (1972) . - R. A. Verrall, M. D. Vlajic, and V. D. Krstic,
J. Nucl. Mater. 274, 54 (1999) . - A. Benyagoub, A. Audren, L. Thomé, and F. Garrido, Appl. Phys. Lett. 89, 241914 (2006).
- A mistake on the swift heavy ion fluence has crept in our previous work (Ref. 16) and the actual fluence was 4×1013 Pb cm−2 instead of 2×1013 Pb cm−2.
- J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Ranges of Ions in Solids (Pergamon, New York, 1985), Vol. 1.
- A. Benyagoub and A. Audren,
Nucl. Instrum. Methods Phys. Res. B 267, 1255 (2009) . - W. K. Chu, J. W. Mayer, and M. -A. Nicolet, Backscattering Spectrometry (Academic, New York, 1978).
- A. Kinomura, A. Chayahara, Y. Mokuno, N. Tsubouchi, and Y. Horino, J. Appl. Phys. 97, 103538 (2005).
- I. Golecki, G. E. Chapman, S. S. Lau, B. Y. Tsauer, and J. W. Mayer,
Phys. Lett. 71A, 267 (1979) . - J. Nakata, M. Takahashi, and K. Kajiyama,
Jpn. J. Appl. Phys., Part 1 20, 2211 (1981) . - J. Linnros, B. Svensson, and G. Holmen, Phys. Rev. B 30, 3629 (1984).
- A. Benyagoub, Phys. Rev. B 72, 094114 (2005).
- A. Benyagoub,
Nucl. Instrum. Methods Phys. Res. B 266, 2766 (2008) . - F. Seitz and J. S. Koehler, Solid State Physics (Academic Press, New York, 1956), Vol. 2, p. 305.
- Z. G. Wang, C. Dufour, E. Paumier, and M. Toulemonde,
J. Phys.: Condens. Matter 6, 6733 (1994) . - G. Szenes, Phys. Rev. B 51, 8026 (1995).
- P. Baeri, C. Spinella, and R. Reitano,
Int. J. Thermophys. 20, 1211 (1999) . - G. Foti,
Appl. Surf. Sci. 184, 20 (2001) . - L. L. Snead and S. J. Zinkle,
Nucl. Instrum. Methods Phys. Res. B 191, 497 (2002) . - F. Priolo, C. Spinella, and E. Rimini, Phys. Rev. B 41, 5235 (1990).
- F. Gao, W. J. Weber, and R. Devanathan,
Nucl. Instrum. Methods Phys. Res. B 191, 487 (2002) . - T. Bus, A. van Veen, A. Shiryaev, A. V. Fedorov, H. Schut, F. D. Tichelaar, and J. Sietsma,
Mater. Sci. Eng., B 102, 269 (2003) . - W. J. Weber,
Nucl. Instrum. Methods Phys. Res. B 166–167, 98 (2000) . - J. F. Gibbons,
Proc. IEEE 60, 1062 (1972) . - A. Audren, A. Benyagoub, L. Thomé, and F. Garrido,
Nucl. Instrum. Methods Phys. Res. B 266, 2810 (2008) . - W. J. Weber, F. Gao, R. Devanathan, W. Jiang, and C. M. Wang,
Nucl. Instrum. Methods Phys. Res. B 216, 25 (2004) .







