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Size and spatial homogeneity of SiGe quantum dots in amorphous silica matrix

J. Appl. Phys. 106, 084319 (2009); doi:10.1063/1.3248373

Published 26 October 2009

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Maja Buljan,1,2 Sara R. C. Pinto,3 Reza J. Kashtiban,4 Anabela G. Rolo,3 Adil Chahboun,3,5 Ursel Bangert,4 Sergey Levichev,3 Václav Holý,1 and Maria J. M. Gomes3
1Faculty of Mathematics and Physics, Charles University in Prague, Prague 12116, Czech Republic
2Ruder Bošković Institute, P.O. Box 180, 10002 Zagreb, Croatia
3Physics Department, University of Minho, 4710-057 Braga, Portugal
4Nanostructured Materials Research Group, School of Materials, The University of Manchester, P.O. Box 88, Manchester, M1 7HS, United Kingdom
5Department of Physics, Dhar Mehraz Sciences Faculty, BP 1796, Fès, Morocco
In this paper, we present a study of structural properties of SiGe quantum dots formed in amorphous silica matrix by magnetron sputtering technique. We investigate deposition conditions leading to the formation of dense and uniformly sized quantum dots, distributed homogeneously in the matrix. X-ray and Raman spectroscopy were used to estimate the Si content. A detailed analysis based on grazing incidence small angle x-ray scattering revealed the influence of the deposition conditions on quantum dot sizes, size distributions, spatial arrangement, and concentration of quantum dots in the matrix, as well as the Si:Ge content. ©2009 American Institute of Physics
History: Received 22 June 2009; accepted 21 September 2009; published 26 October 2009
Permalink: http://link.aip.org/link/?JAPIAU/106/084319/1
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KEYWORDS and PACS

Keywords
PACS
  • 68.65.Hb
    Quantum dots patterned in quantum wells (structure and nonelectronic properties)
  • 78.67.Hc
    Optical properties of quantum dots
  • 81.07.Ta
    Quantum dots: fabrication and characterization
  • 81.15.Cd
    Deposition by sputtering
  • 78.30.Hv
    Infrared and Raman spectra in nonmetallic inorganics
  • 78.70.Ck
    X-ray scattering (condensed matter)
  • YEAR: 2009

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PUBLICATION DATA

ISSN:
0021-8979 (print)   1089-7550 (online)
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