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Size-dependent polymorphism in HfO2 nanotubes and nanoscale thin films

J. Appl. Phys. 106, 084322 (2009); doi:10.1063/1.3243077

Published 29 October 2009

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Michael Shandalov and Paul C. McIntyre
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305, USA
Many metal oxides exhibit size-dependent phase transitions among multiple polymorphs. In this work, the microstructure and crystallinity of ultrathin HfO2 films and utrathin-wall nanotubes were investigated by high-resolution electron microscopy and electron diffraction after high-temperature annealing. Nanotubes were formed by atomic layer deposition of HfO2 on epitaxial Ge <111> nanowire arrays on Si (111) substrates followed by selective etching of the Ge wires. A size-dependent phase transition sequence from amorphous (a-HfO2) to tetragonal (t-HfO2) and from tetragonal to monoclinic (m-HfO2) phase was observed with increasing film and nanotube wall thickness. These results are analyzed in light of recent predictions of surface energy-driven phase transitions in nanoscale fluorite-structure oxides. ©2009 American Institute of Physics
History: Received 2 July 2009; accepted 8 September 2009; published 29 October 2009
Permalink: http://link.aip.org/link/?JAPIAU/106/084322/1
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KEYWORDS and PACS

Keywords
PACS
  • 64.70.K-
    Solid-solid transitions
  • 61.46.Np
    Structure of nanotubes (hollow nanowires)
  • 68.55.A-
    Thin film nucleation and growth
  • 81.40.Ef
    Cold working, work hardening and annealing
  • 61.50.Ks
    Crystallographic aspects of phase transformations; pressure effects
  • 81.15.Ef
    Vacuum deposition
  • 65.40.gp
    Surface energy of crystalline solids
  • YEAR: 2009

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PUBLICATION DATA

ISSN:
0021-8979 (print)   1089-7550 (online)
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