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Mechanism of Na-doped p-type ZnO films: Suppressing Na interstitials by codoping with H and Na of appropriate concentrations

J. Appl. Phys. 106, 093508 (2009); doi:10.1063/1.3254221

Published 6 November 2009

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S. S. Lin, H. P. He, Y. F. Lu, and Z. Z. Ye
State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027, China
Hydrogen is codoped with sodium into ZnO films. X-ray photoelectron spectroscopy and secondary ion mass spectroscopy indicate that the Na concentration decreases as the substrate temperature increases. Hall-effect tests reveal a transition from n-type to p-type conduction when the growth temperature increases, which is explained by the suppression of Na interstitials by codoping with H and Na of appropriate concentrations. An insulating intended Na–H codoped sample shows reduced resistivity and p-type conductivity after annealing at 550 °C, which may be due to dissociation of NaZn–H complexes. The realization of p-type ZnO by Na–H codoping may explain the discrepancies in behavior of Na in ZnO and suggests the potential of Na–H codoping method [E.-C. Lee and K. J. Chang, Phys. Rev. B 70, 115210 (2004)]. ©2009 American Institute of Physics
History: Received 16 July 2009; accepted 29 September 2009; published 6 November 2009
Permalink: http://link.aip.org/link/?JAPIAU/106/093508/1
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KEYWORDS and PACS

Keywords
PACS
  • 61.72.uj
    Doping and impurity implantation in III-V and II-VI semiconductors
  • 61.72.sd
    Impurity concentration in crystals
  • 79.60.Dp
    Photoelectron spectra of adsorbed layers and thin films
  • 61.72.jj
    Interstitials
  • 81.40.Ef
    Cold working, work hardening and annealing
  • 73.61.Ga
    Electrical properties of II-VI semiconductors (thin films)
  • 73.50.Jt
    Galvanomagnetic and other magnetotransport effects in thin films
  • YEAR: 2009

PUBLICATION DATA

ISSN:
0021-8979 (print)   1089-7550 (online)
Publisher:
AIP is a member of CrossRef AIP

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