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Abstract: Dynamic-implant profiling by low-energy nuclear reaction spectroscopy

J. Vac. Sci. Technol. Volume 14, Issue 1, pp. 501-501 (January 1977)

Issue Date: January 1977
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PACS

  • 61.70.Wp
    Structure of liquids and solids; crystallography Defects in crystals Impurity concentration, distribution, and gradients
  • 61.70.Tm
    Structure of liquids and solids; crystallography Defects in crystals Doping and implantation of impurities
  • 82.80.-d
    Physical chemistry Chemical analysis and related physical methods of analysis
  • YEAR: 1977

PUBLICATION DATA

ISSN:
0022-5355 (print)  
Publisher:
AIP is a member of CrossRef AVS
D. F. Cowgill
Sandia Laboratories, Albuquerque, New Mexico 87115

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