Hydrogen pumping and release by graphite under high-flux plasma bombardment
Inert gas (helium or argon) plasma bombardment has been found to increase the surface gas adsorptivity of isotropic graphite (POCO-graphite), which can then getter residual gases in a high-vacuum syst...
Diagnostics by optical emission spectroscopy in the vicinity of the substrate during magnetron sputtering of Ti
The spatial distribution of excited states for neutral Ti and Ar, as well as for ionized Ti, have been investigated in Ar discharges at 0.27 Pa, in the neighborhood of a grounded substrate, at variabl...
M. H. Cho, N. Hershkowitz, and T. Intrator Department of Nuclear Engineering and Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706
Wehave performed experimental measurements to determine the temporal evolution ofLangmuir sheaths near an electrode to which a negative stepbias is applied in a collisionless argon plasma. The plasmawas produced by a hot-filament discharge in a multidipole device.Plasma potential data were obtained using emissive probes with twodifferent techniques: time resolved sampling and time averaged techniques. Thesheath is found to initially form close to the electrode,to extend to a maximum separation, and to contract toa steady-state value. The time scale required to reach asteady state is close to the time scale of thepresheath relaxation. Characteristics of sheaths in rf plasmas are alsomeasured using a parallel-plate plasma capacitor. It is observed thatthe plasma potential profile has significant variation with frequency, evenfor frequencies as low as 1 kHz which are farbelow the ion plasma frequency (~1 MHz).
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