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) is calculated for the 200−2000 cm−1 range and the maximum value of
is found to be ~105 cm−1 at a frequency of 560 cm−1. With increasing free carrier concentration, the FWHM of the absorption peak increased by 35%−40% as compared to an unintentionally doped (<1×1016 cm−3) film.
©2008 American Vacuum Society
| History: | Received 6 July 2007; accepted 5 November 2007; published 3 January 2008 |
| Permalink: | http://dx.doi.org/10.1116/1.2819259 |