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Comparison of ZnO nanostructures grown using pulsed laser deposition, metal organic chemical vapor deposition, and physical vapor transport

J. Vac. Sci. Technol. B Volume 27, Issue 3, pp. 1678-1683 (May 2009)

Published 28 May 2009
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KEYWORDS and PACS

Keywords
PACS
  • 81.07.Bc
    Nanocrystalline materials: fabrication and characterization
  • 82.45.Yz
    Nanostructured materials in electrochemistry
  • 81.16.Mk
    Laser-assisted deposition in nanofabrication and processing
  • 81.15.Gh
    Chemical vapor deposition
  • 78.55.Et
    Photoluminescence in II-VI semiconductors
  • 78.55.Ap
    Photoluminescence in elemental semiconductors
  • YEAR: 2009

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PUBLICATION DATA

ISSN:
1071-1023 (print)   1520-8567 (online)
Publisher:
AIP is a member of CrossRef AVS
V. E. Sandana
Nanovation, 103B Rue de Versailles, 91400 Orsay, France; Center for Quantum Devices, Northwestern University, Evanston, Illinois 60208; and Department of Irradiated Solids, Ecole Polytechnique, 91128 Palaiseau, France

D. J. Rogers and F. Hosseini Teherani
Nanovation, 103B Rue de Versailles, 91400 Orsay, France

R. McClintock, C. Bayram, and M. Razeghi
Center for Quantum Devices, Northwestern University, Evanston, Illinois 60208

H.-J. Drouhin and M. C. Clochard
Department of Irradiated Solids, Ecole Polytechnique, 91128 Palaiseau, France

V. Sallet
GEMAC, 45 avenue des Etats-Unis, 78035 Versailles, France

G. Garry
Thales Research & Technology, Route Départementale 128, F-91767 Palaiseau, France

F. Falyouni
GEMAC, 45 avenue des Etats-Unis, 78035 Versailles, France
This article compares the forms and properties of ZnO nanostructures grown on Si(111) and c-plane sapphire (c-Al2O3) substrates using three different growth processes: metal organic chemical vapor deposition (MOCVD), pulsed laser deposition (PLD), and physical vapor transport (PVT). A very wide range of ZnO nanostructures was observed, including nanorods, nanoneedles, nanocombs, and some novel structures resembelling “bevelled” nanowires. PVT gave the widest family of nanostructures. PLD gave dense regular arrays of nanorods with a preferred orientation perpendicular to the substrate plane on both Si and c-Al2O3 substrates, without the use of a catalyst. X-ray diffraction (XRD) studies confirmed that nanostructures grown by PLD were better crystallized and more highly oriented than those grown by PVT and MOCVD. Samples grown on Si showed relatively poor XRD response but lower wavelength emission and narrower linewidths in PL studies. ©2009 American Vacuum Society
History: Received 8 December 2008; accepted 27 April 2009; published 28 May 2009
Permalink: http://dx.doi.org/10.1116/1.3137990

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