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Optical emission spectroscopy for simultaneous measurement of plasma electron density and temperature in a low-pressure microwave induced plasma

Phys. Plasmas 16, 103501 (2009); doi:10.1063/1.3240325

Published 5 October 2009

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N. Konjević,1,2 S. Jovićević,1 and M. Ivković1
1Institute of Physics, University of Belgrade, P.O. Box 68, Belgrade 11081, Serbia
2Faculty of Physics, University of Belgrade, P.O. Box 368, Belgrade 11001, Serbia
The simple optical emission spectroscopy technique for diagnostics of low pressure microwave induced plasma (MIP) in hydrogen or in MIP seeded with hydrogen is described and tested. This technique uses the Boltzmann plot of relative line intensities along Balmer spectral series in conjunction with the criterion for partial local thermodynamic equilibrium for low electron density (Ne) plasma diagnostics. The proposed technique is tested in a low pressure MIP discharge for simultaneous determination of electron density Ne (1017–1018  m−3) and temperature Te. ©2009 American Institute of Physics
History: Received 24 April 2009; accepted 8 September 2009; published 5 October 2009
Permalink: http://link.aip.org/link/?PHPAEN/16/103501/1
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KEYWORDS and PACS

Keywords
PACS
  • 07.57.-c
    Infrared, submillimeter wave, microwave and radiowave instruments and equipment
  • 32.30.Jc
    Visible and ultraviolet atomic spectra
  • 32.70.Jz
    Atomic line shapes, widths, and shifts
  • 32.70.-n
    Intensities and shapes of atomic spectral lines
  • 52.50.Dg
    Plasma sources
  • 52.75.Hn
    Plasma torches
  • 84.40.-x
    Radiowave and microwave technology
  • YEAR: 2009

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PUBLICATION DATA

ISSN:
1070-664X (print)   1089-7674 (online)
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