Scanning tunneling microscope instrumentation
Rev. Sci. Instrum. 60, 165 (1989); doi:10.1063/1.1140457
Issue Date: February 1989
You are not logged in to this journal. Log in
A review is presented of the basic operating principles of scanning tunneling microscopy and spectroscopy. The physical and electronic design of the scanning tunneling microscope is discussed, and other new microscopes using similar concepts are described. Some examples of the past accomplishments of scanning tunneling microscopy are given, and prospects for future applications are assessed.
Review of Scientific Instruments is copyrighted by The American Institute of Physics.
| History: | Received 11 July 1988; accepted 21 October 1988 |
| Permalink: |
http://link.aip.org/link/?RSINAK/60/165/1 |
KEYWORDS and PACS
USES,
REVIEWS,
DESIGN,
SCANNING ELECTRON MICROSCOPY,
SURFACE ANALYSIS,
SPATIAL RESOLUTION,
SURFACE STRUCTURE
- 07.80.+x
Specific instrumentation and techniques of general use in physics Electron and ion microscopes and spectrometers; techniques - 61.16.Di
Structure of liquids and solids; crystallography Other determination of structures Electron microscopy determinations (including scanning tunneling electron microscopy methods) - YEAR: 1988-89
RELATED DATABASES
PUBLICATION DATA
0034-6748 (print)
1089-7623 (online)
REFERENCES (161)
For access to fully linked references, you need to log in.
For access to fully linked references, you need to Log in.
- G. Binnig, H. Rohrer, Ch. Gerber, and E. Weibel, Appl. Phys. Lett. 40, 178 (1982);
- G. Binnig, H. Rohrer, Ch. Gerber, and E. Weibel, Phys. Rev. Lett. 50, 120 (1983).
- G. Binnig and H. Rohrer,
Helv. Phys. Acta 55, 726 (1982 ). - C. F. Quate, Phys. Today 26 (Aug 1986).
- P. K. Hansma and J. Tersoff, J. Appl. Phys. 61, R1 (1987).
- T. E. Feuchtwang and P. H. Cutler,
Phys. Scr. 35, 132 (1987 ). - G. K. Binnig and H. Rohrer, Rev. Mod. Phys. 59, 615 (1987).
- R. H. Fowler and L. Nordheim,
Proc. R. Soc. London A 119, 173 (1928 ). - R. D. Young, J. Ward, and F. Scire, Phys. Rev. Lett. 27, 922 (1971).
- C. B. Duke, Tunneling in Solids (Academic, New York, 1969).
- E. L. Wolf, Principles of Electron Tunneling Spectroscopy (Clarendon, Oxford, 1985).
- J. G. Simmons, J. Appl. Phys. 34, 1973 (1963).
- R. Young, J. Ward, and F. Scire, Rev. Sci. Instrum. 43, 999 (1972).
- E. C. Teague, Ph.D. thesis, North Texas State University, 1978.
- J. Bardeen,
Phys. Rev. Lett. 6, 57 (1961 ). - W. A. Harrison, Phys. Rev. 123, 85 (1961).
- J. Tersoff and D. R. Hamann, Phys. Rev. Lett. 50, 25 (1983);
- T. E. Feuchtwang, P. H. Cutler, and N. M. Miskovsky,
Phys. Lett. 99A, 167 (1983 );
M. S. Chung, P. H. Cutler, and T. E. Feuchtwang, - A. Baratoff,
Physica 127B, 143 (1984 ). - N. D. Lang, Phys. Rev. Lett. 55, 230 (1985);
- C. J. Chen,
J. Vac. Sci. Technol. A 6, 319 (1988 ). - A. Selloni, P. Carevali, E. Tosatti, and C. D. Chen, Phys. Rev. B 34, 994 (1986).
- R. M. Feenstra, J. A. Stroscio, and A. P. Fein,
Surf. Sci. 181, 295 (1987 ). - R. Feenstra, J. Stroscio, and A. P. Fein, Phys. Rev. Lett. 58, 1192 (1987).
- R. J. Hamers, R. M. Tromp, and J. E. Demuth, Phys. Rev. Lett. 56, 1972 (1986).
- R. S. Becker, J. A. Golovchenko, D. R. Hamann, and B. S. Swartzentruber, Phys. Rev. Lett. 55, 2032 (1985).
- N. D. Lang, Phys. Rev. B 34, 1164 (1986).
- R. Becker and R. M. Feenstra (private communication).
- Skock and Vibration Handbook, edited by C. M. Harris and C. E. Crede (McGraw-Hill, New York, 1976).
- R. W. Little, Elasticity (Prentice-Hall, Englewood Cliffs, New Jersey, 1973).
- S.-I. Park and C. F. Quate, Rev. Sci. Instrum. 58, 2004 (1987).
- D. W. Pohl,
IBM J. Res. Dev. 30, 417 (1986 ). - M. Okano, K. Kajimura, S. Wakiyama, F. Sakai, W. Mizutani, and M. Ono,
J. Vac. Sci. Technol. A 5, 3313 (1988 ). - G. Binnig, N. Garcia, and H. Rohrer, Phys. Rev. B 32, 1336 (1985).
- Ch. Gerber, G. Binnig, H. Fuchs, O. Marti, and H. Rohrer, Rev. Sci. Instrum. 57, 221 (1986).
- P. K. Hansma,
IBM J. Res. Dev. 30, 396 (1986 ). - G. Binnig and H. Rohrer,
IBM J. Res. Dev. 30, 355 (1986 ). - W. G. Cady, Piezoelectricity (McGraw-Hill, New York, 1946).
- J. van Randeraat and R. E. Setterington, PXE Piezoelectric Meramics (Mullard, London, England, 1975).
- B. Jaffe, R. S. Roth, and S. Marzullo,
J. Res. Natl. Bur. Stand. 55, 239 (1955 ). - W. R. Cook, D. A. Berlincourt, and F. J. Scholz, J. Appl. Phys. 34, 1392 (1963).
- G. Nishikawa, M. Tomitori, and A. Minakuchi,
Surf. Sci. 181, 210 (1987 ). - Y. Kuk and P. J. Silverman, Appl. Phys. Lett. 48, 1597 (1986).
- S. Chiang and R. J. Wilson,
IBM J. Res. Dev. 30, 515 (1986 ). - C. P. Germano, IRE Trans. 7, 13 (1959).
- G. Binnig and D. P. E. Smith, Rev. Sci. Instrum. 57, 1688 (1986).
- G. F. A. van der Walle, J. W. Gerritsen, H. van Kempen, and P. Wyder, Rev. Sci. Instrum. 56, 1573 (1985).
- S. Gregory and C. T. Rogers,
J. Vac. Sci. Technol. A 6, 390 (1988 ). - J. W. Lyding, S. Skala, R. Brockenbrough, J. S. Hubacek, and G. Gammie, Bull. Am. Phys. Soc. 33, 319 (1988).
- B. W. Corb, M. Ringger, and H.-J. Guntherodt, J. Appl. Phys. 58, 3947 (1985).
- K. Kajimura, H. Bando, K. Endo, W. Mitzutani, H. Murakami, M. Okano, S. Okayarna, M. Ono, Y. Ono, H. Tokumoto, F. Sakai, K. Watanabe, and S. Wakiyama,
Surf. Sci. 181, 165 (1987 ). - M. Anders, M. Thaer, and C. Heiden,
Surf. Sci. 181, 176 (1987 ). - D. W. Pohl, Rev. Sci. Instrum. 58, 54 (1987).
- Inchworm is commercially available from Burleigh Instruments, Inc., Fisher, New York.
- R. M. Feenstra, W. A. Thompson, and A. P. Fein, Phys. Rev. Lett. 56, 608 (1986);
- T. A. Golovchenko,
Science 232, 48 (1986 ). - S. Chiang, R. J. Wilson, Ch. Gerber, and V. M. Hallmark,
J. Vac. Sci. Technol. A 6, 386 (1987 ). - D. W. Abraham, H. J. Mamin, E. Ganz, and J. Clarke, IBM J. Res. Dev. 30, 493 (1986).
- N. J. Zheng, U. Knipping, I. S. T. Tsong, W. T. Petuskey, and J. C. Barry,
J. Vac. Sci. Technol. A 6, 457 (1988 ). - Th. Berghaus, H. Neddermeyer, and St. Tosch,
IBM J. Res. Dev. 30, 520 (1986 ). - J. E. Demuth, R. J. Hamers, R. M. Tromp, and M. E. Welland, IBM J. Res. Dev. 30, 397 (1986).
- T. Sakurai, T. Hashizume, I. Kamiya, Y. Hasegawa, A. Sakai, J. Matsui, E. Kono, T. Takahashi, and M. Ogawa, J. Vac. Sci. Technol. (in press, 1988).
- M. P. Cox and P. R. Griffin,
J. Vac. Sci. Technol. A 6, 376 (1988 );
this design is available commercially by VG Microscopes Limited, East Grinstead, England. - S.-I. Park and C. F. Quate, Rev. Sci. Instrum. 58, 2010 (1987).
- W. J. Kaiser and R. C. Jaklevic,
Surf. Sci. 182, L227 (1987 ). - M. D. Pashley, K. W. Haberern, and W. Friday,
J. Vac. Sci. Technol. A 6, 488 (1988 ). - B. Drake, R. Sonnenfeld, J. Schneir, P. K. Hansma, G. Slough, and R. V. Coleman, Rev. Sci. Instrum. 57, 441 (1986).
- V. Elings and F. Wudl,
J. Vac. Sci. Technol. A 6, 412 (1988 );
this design is available commercially from Digital Instruments, Inc., Goleta, CA. - A. P. Fein, J. R. Kirtley, and R. M. Feenstra, Rev. Sci. Instrum. 58, 1806 (1987).
- J. G. H. Hermsen, H. van Kempen, B. J. Nelissen, L. L. Soethout, G. F. A. van der Walle, P. J. W. Weijs, and P. Wyder,
Surf. Sci. 181, 183 (1987 ). - M. Salmeron, B. Marchon, S. Ferrer, and D. S. Kaufman, Phys. Rev. B 35, 3036 (1987);
- P. Davidsson, T. Claeson, and S. Pehrson,
J. Vac. Sci. Technol. A 6, 380 (1988 ). - Commercially available design irons W. A. Technology, Cambridge, England.
- P. Lustenberger, H. Rohrer, R. Christoph, and H. Siegenthaler, J. Electroanal. Chem. (in print, 1988).
- K. Besocke,
Surf. Sci. 181, 145 (1987 ). - R. Guckenberger, C. Kosslinger, and W. Baumeister,
J. Vac. Sci. Technol. A 6, 383 (1988 ). - L. Arnold, W. Krieger, and H. Walther,
J. Vac. Sci. Technol. A 6, 466 (1988 ). - Y. Kuk, P. J. Silverman, H. Q. Nguyen, and P. H. Cutler (to be published).
- Tunneling Spectroscopy, edited by P. K. Hansma (Plenum, New York, 1982).
- S. A. Elrod, A. L. de Lozanne, and C. F. Quate, Appl. Phys. Lett. 45, 1240 (1984).
- C. G. Slough, W. W. McNairy, R. V. Coleman, B. Drake, and P. K. Hansma, Phys. Rev. B 34, 994 (1986).
- D. Eigler, Bull. Am. Phys. Soc. 32, 542 (1987).
- H. Q. Nguyen, Ph.D. thesis, The Pennsylvania State University, 1988.
- F. M. Chua, Ph.D. thesis, Cambridge University, 1988.
- R. C. Dorf, Modern Control System (Addison-Wesley, Reading, MA, 1983).
- A. P. Sage and C. C. White, Optimum System Control (Prentice-Hall, Englewood Cliffs, NJ, 1977).
- M. Auguilar, P. J. Pascual, and A. Santisteba,
IBM J. Res. Dev. 30, 525 (1986 ). - P. H. Schroer and J. Becker,
IBM J. Res. Dev. 30, 543 (1986 ). - U. H. Bapst,
Surf. Sci. 181, 157 (1987 ). - A. Bryant, D. E. P. Smith, and C. F. Quate, Appl. Phys. Lett. 48, 832 (1986).
- L. W. Swanson and L. C. Crouser, J. Appl. Phys. 40, 4741 (1969).
- H. W. Fink, IBM J. Res. Dev. 30, 461 (1986).
- Y. Kuk, P. J. Silverman, and H. Q. Nguyen,
J. Vac. Sci. Technol. A 6, 524 (1988 ). - R. S. Becker, J. A. Golovchenko, G. S. Higashi, and B. S. Swartzentruber, Phys. Rev. Lett. 57, 1020 (1986).
- S.-I. Park and C. F. Quate, Appl. Phys. Lett. 48, 112 (1986).
- R. Sonnenfeld and P. K. Hansma,
Science 232, 211 (1986 ). - G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).
- P. Muralt and D. W. Pohl, Appl. Phys. Lett. 48, 514 (1986).
- U. Durig, D. W. Pohl, and F. Rohner, J. Appl. Phys. 59, 3318 (1986).
- J. R. Matey and J. Blanc, J. Appl. Phys. 57, 1437 (1985).
- W. J. Kaiser and L. D. Bell, Phys. Rev. Lett. 60, 1406 (1988).
- D. W. Pohl and R. Moller, Rev. Sci. Instrum. 59, 840 (1988).
- D. Tabor and R. H. S. Winterton,
Proc. R. Soc. A 312, 435 (1969 ). - U. Durig, J. K. Gimzewski, and D. W. Pohl, Phys. Rev. Lett. 59, 2403 (1986).
- C. M. Mate, G. M. McClelland, R. Erlandsson, and S. Chiang, Phys. Rev. Lett. 59, 1942 (1987).
- Y. Martin, C. C. Williams, and H. K. Wickeramasinghe, J. Appl. Phys. 61, 4723 (1987).
- O. Marti, B. Drake, and P. K. Hansma, Appl. Phys. Lett. 51, 484 (1987).
- G. Binnig, Ch. Gerber, E. Stoll, T. R. Albrecht, and C. F. Quate,
Europhys. Lett. 3, 1281 (1987 ). - R. Yang, R. Miller, and P. J. Bryant, J. Appl. Phys. 63, 570 (1988).
- T. R. Albrecht and C. F. Quate, J. Appl. Phys. 62, 2599 (1987).
- G. M. McClelland, R. Erlandsson, and S. Chiang, Review of Progress in Quantitative Non-Destructive Evaluation, edited by D. O. Thompson and D. E. Chimenti (Plenum, New York, 1987), Vol. 6 B, pp. 1307–1314.
- P. Muralt, H. Meiser, D. W. Pohl, and H. W. M. Salemink, Appl. Phys. Lett. 50, 1352 (1987).
- J. R. Kirtley, S. Washburn, and M. J. Brady, Phys. Rev. Lett. 60, 1546 (1988).
- E. A. Ash and G. Nicholas,
Nature 237, 510 (1972 ). - U. Ch. Fischer and H. P. Zingsheim, Appl. Phys. Lett. 40, 195 (1982).
- A. Lewis, M. Isaacson, H. Harootunian, and A. Murray,
Ultramicroscopy 13, 227 (1984 ). - R. S. Becker, J. A. Golovchenko, E. G. McRae, and B. S. Swartzentruber, Phys. Rev. Lett. 55, 2028 (1985).
- R. J. Hamers, R. M. Tromp, and J. E. Demuth, Phys. Rev. Lett. 56, 1972 (1986).
- R. M. Tromp, R. J. Hamers, and J. E. Demuth, Phys. Rev. B 34, 1388 (1986).
- Th. Berhaus, A. Brodde, H. Neddermeyer, and St. Tosch,
J. Vac. Sci. Technol. A 6, 483 (1988 ). - K. Takayanagi, Y. Tanishiro, M. Takahashi, and S. Takahashi,
J. Vac. Sci. Technol. A 3, 1502 (1985 ). - R. M. Tromp, R. J. Hamers, and J. E. Demuth, Phys. Rev. Lett. 55, 1303 (1985);
- R. S. Becker, B. S. Swartzentruber, and J. S. Vickers,
J. Vac. Sci. Technol. A 6, 478 (1988 ). - Th. Berghaus, A. Brodde, H. Neddermeyer, and St. Tosch,
J. Vac. Sci. Technol. A 6, 478 (1988 ). - J. A. Stroscio, R. M. Feenstra, and A. P. Fein, Phys. Rev. Lett. 57, 2579 (1986);
- J. A. Stroscio, R. M. Feenstra, and A. P. Fein, Phys. Rev. Lett. 58, 1668 (1987).
- R. J. Wilson and S. Chiang, Phys. Rev. Lett. 58, 369 (1987);
- E. J. van Loenen, J. E. Demuth, R. M. Tromp, and R. J. Hamers, Phys. Rev. Lett. 58, 373 (1987).
- R. J. Wilson and S. Chiang, Phys. Rev. Lett. 58, 2575 (1987).
- R. J. Hamers and J. E. Demuth,
J. Vac. Sci. Technol. A 6, 512 (1988 ). - R. S. Becker, B. S. Swatzentruber, J. S. Vickers, M. S. Hybertsen, and S. G. Louie, Phys. Rev. Lett. 60, 116 (1988).
- J. Nogami, S.-I. Park, and C. F. Quate, Phys. Rev. B 36, 6221 (1987).
- G. Binnig, H. Rohrer, Ch. Gerber, and E. Weibel,
Surf. Sci. 131, L379 (1983 ). - H. Q. Nguyen, Y. Kuk, and P. J. Silverman, J. Phys. (to be published, 1989).
- V. M. Hallmark, S. Chiang, J. F. Rabolt, J. D. Swalen, and R. J. Wilson, Phys. Rev. Lett. 59, 2879 (1987).
- Y. Kuk, P. J. Silverman, and M. F. Jarrold (to be published).
- Y. Kuk, P. J. Silverman, and H. Q. Nguyen, Phys. Rev. Lett. 59, 1452 (1987).
- R. J. Behm, W. Hosler, E. Ritter, and G. Binnig, Phys. Rev. Lett. 56, 228 (1986);
- B. Marchon, P. Bernhardt, M. E. Bussell, G. A. Somorjai, M. Salmeron, and W. Siekhaus, Phys. Rev. Lett. 60, 1166 (1988).
- Y. Kuk, P. J. Silverman, and T. M. Buck, Phys. Rev. B 36, 2863 (1987).
- P. K. Hansma, Bull. Am. Phys. Soc. 30, 251 (1985).
- R. V. Coleman, B. Drake, P. K. Hansma, and G. Slough, Phys. Rev. Lett. 55, 394 (1985).
- G. Binnig, H. Fuchs, Ch. Gerber, H. Rohrer, E. Stoll, and E. Tosattis,
Europhys. Lett. 1, 31 (1986 ). - H. J. Mamin, E. Ganz, D. W. Abraham, R. E. Thomson, and J. Clarke, Phys. Rev. B 34, 9015 (1986).
- J. M. Soller, A. M. Baro, N. Garcia, and H. Rohrer, Phys. Rev. Lett. 57, 444 (1986).
- More papers were published in the Proceedings of the 1st and 2nd International Conference on STM. Surf. Sci. 181 (March, 1987);
- B. Giambattista, A. Johnson, R. V. Coleman, B. Drake, and P. K. Hansma, Phys. Rev. B 37, 2741 (1988);
- T. Sleator and R. Tycko, Phys. Rev. Lett. 60, 1418 (1988).
- M. Amrein, A. Stasiak, H. Gross, E. Stoll, and G. Travaglini,
Science 240, 514 (1988 ). - J. K. Gimzewski, E. Stoll, and R. R. Schlittler,
Surf. Sci. 181, 267 (1987 ). - R. Guckenberger, C. Kosslinger, R. Gatz, H. Breu, N. Levin, and W. Baumeister, Ultramicroscopy (to be published).
- J. Schneir and P. K. Hansma (private communication).
- J. S. Foster and J. E. Frommer, Nature (to be published).
- M. Gerhrtz, H. Strecker, and H. Grim,
J. Vac. Sci. Technol. A 6, 432 (1988 ). - N. Garcia, A. M. Baro, R. Garcia, J. P. Pena, and H. Rohrer, Appl. Phys. Lett. 47, 367 (1985).
- S. Okayama, M. Komino, W. Mizutani, H. Tokumoto, M. Okano, K. Shimizu, Y. Kobayashi, F. Matsumoto, S. Wakiyama, M. Shigeno, F. Sakai, S. Fujiwara, O. Kitamina, M. Ono, and K. Kajimura,
J. Vac. Sci. Technol. A 6, 440 (1988 ). - M. A. McCord and R. F. W. Pease, Appl. Phys. Lett. 50, 569 (1987).
- U. Staufer, R. Wiesendanger, L. Eng, L. Rosenthaler, H. R. Hidber, H.-J. Guntherodt, and N. Garcia, Appl. Phys. Lett. 51, 244 (1987).
- R. C. Jaklevic and L. Elie, Phys. Rev. Lett. 60, 120 (1988).
- R. S. Becker, J. A. Golovchenko, and B. S. Swartzentruber,
Nature 325, 419 (1987 ). - B. Drake, R. Sonnenfeld, J. Schneir, and P. K. Hansma,
Surf. Sci. 181, 92 (1987 ).
Physica 109/110b, 2075 (1982).
Phys. Rev. Lett. 58, 45 (1987).






