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Microstitching interferometry for x-ray reflective optics

Rev. Sci. Instrum. 74, 2894 (2003); doi:10.1063/1.1569405

Issue Date: May 2003

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Kazuto Yamauchi
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Yamada-oka 2-1, Suita, Osaka 565-0871, Japan

Kazuya Yamamura
Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, Yamada-oka 2-1, Suita, Osaka 565-0871, Japan

Hidekazu Mimura, Yasuhisa Sano, Akira Saito, and Kazumasa Ueno
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Yamada-oka 2-1, Suita, Osaka 565-0871, Japan

Katsuyoshi Endo
Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, Yamada-oka 2-1, Suita, Osaka 565-0871, Japan

Alexei Souvorov and Makina Yabashi
SPring-8/Japan Synchrotron Radiation Research Institute (JASRI), Kouto 1-1-1, Mikazuki, Hyogo 679-5148, Japan

Kenji Tamasaku and Tetsuya Ishikawa
SPring-8/RIKEN, Kuoto 1-1-1, Mikazuki, Hyogo 679-5148, Japan

Yuzo Mori
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Yamada-oka 2-1, Suita, Osaka 565-0871, Japan
A new stitching interferometry based on a microscopic interferometer having peak-to-valley height accuracy of subnanometer order and lateral resolution higher than 20 µm was developed to measure surface figures of large-size x-ray mirror optics. Cumulative errors of the stitching angle in a long spatial wavelength range were effectively reduced to be 1×10–7 rad levels using another interferometer having a large cross section in the optical cavity. Some optical performances of ultraprecise x-ray mirrors, such as submicrofocused beam profile, were wave optically calculated from the measured surface figure profiles and observed at the 1 km long beamline (BL29XUL) of SPring-8. Observed and wave optically calculated results were in good agreement with a high degree of accuracy. ©2003 American Institute of Physics.
History: Received 12 December 2002; accepted 5 February 2003
Permalink: http://link.aip.org/link/?RSINAK/74/2894/1
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KEYWORDS and PACS

Keywords
PACS
  • 07.85.-m
    X- and gamma-ray instruments
  • 41.50.+h
    X-ray beams and X-ray optics
  • 42.79.-e
    Optical elements, devices, and systems
  • YEAR: 2003

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PUBLICATION DATA

ISSN:
0034-6748 (print)   1089-7623 (online)
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