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High-throughput combinatorial study of local stress in thin film composition spreads

Rev. Sci. Instrum. 78, 072208 (2007); doi:10.1063/1.2755779

Published 12 July 2007

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Noble C. Woo
Department of Chemistry and Chemical Biology, Cornell University, Ithaca, New York 14853

Bryan G. Ng
Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139

R. Bruce van Dover
Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853
We investigate the stresses in thin films with sub-millimeter lateral spatial resolution using a dense array of prefabricated cantilever beams prepared by microelectromechanical-system techniques. Stress induced deflection of the cantilever is interrogated by an optical (laser/position sensitive detector) measurement system. Composition spread films are deposited on the cantilever array using a three gun on-axis magnetron cosputtering system. The position dependent composition is inferred using rate calibrations and verified by electron microprobe/energy dispersive spectroscopy. We demonstrate the function of this system using an Fe–Ni–Al composition spread with ~1  at.  % resolution. This approach allows for measurement of the composition dependence of other electromechanical properties such as the martensitic phase transition temperature of traditional and ferromagnetic shape-memory alloys, as well as the properties of hydrogen storage materials and the magnetic response of magnetostrictive materials. ©2007 American Institute of Physics
History: Received 7 November 2006; accepted 9 April 2007; published 12 July 2007
Permalink: http://link.aip.org/link/?RSINAK/78/072208/1
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KEYWORDS and PACS

Keywords
PACS
  • 07.10.Cm
    Micromechanical devices and systems
  • 68.60.Bs
    Mechanical and acoustical properties of thin films
  • 85.85.+j
    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
  • YEAR: 2007

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ISSN:
0034-6748 (print)   1089-7623 (online)
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