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Getter sputtering system for high-throughput fabrication of composition spreads

Rev. Sci. Instrum. 78, 072212 (2007); doi:10.1063/1.2755967

Published 13 July 2007

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John M. Gregoire
Department of Physics, Cornell University, Ithaca, New York 14853 and Cornell Fuel Cell Institute, Cornell University, Ithaca, New York 14853

R. B. van Dover
Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853 and Cornell Fuel Cell Institute, Cornell University, Ithaca, New York 14853

Jing Jin, Francis J. DiSalvo, and Héctor D. Abruña
Department of Chemistry and Chemical Biology, Cornell University, Ithaca, New York 14853 and Cornell Fuel Cell Institute, Cornell University, Ithaca, New York 14853
We describe a sputtering system that can deposit composition spreads in an effectively UHV environment but which does not require the high-throughput paradigm to be compromised by a long pump down each time a target is changed. The system deploys four magnetron sputter guns in a cryoshroud (getter sputtering) which allows elements such as Ti and Zr to be deposited with minimal contamination by oxygen or other reactive background gases. The system also relies on custom substrate heaters to give rapid heating and cool down. The effectiveness of the gettering technique is evaluated, and example results obtained for catalytic activity of a pseudoternary composition spread are presented. ©2007 American Institute of Physics
History: Received 3 November 2006; accepted 13 February 2007; published 13 July 2007
Permalink: http://link.aip.org/link/?RSINAK/78/072212/1
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Supplemental Material

KEYWORDS and PACS

Keywords
PACS
  • 07.30.Cy
    Vacuum pumps
  • 81.05.-t
    Specific materials: fabrication, treatment, testing, and analysis
  • 81.15.Cd
    Deposition by sputtering
  • 82.65.+r
    Surface and interface chemistry; heterogeneous catalysis at surfaces
  • YEAR: 2007

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PUBLICATION DATA

ISSN:
0034-6748 (print)   1089-7623 (online)
Publisher:
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REFERENCES (17)
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  15. See EPAPS Document No. E-RSINAK-78-058707 for additional information on heater design. This document can be reached via a direct link in the online article's HTML reference section or via the EPAPS homepage (http://www.aip.org/pubservs/epaps.html). [EPAPS]
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