Focusing mirror for x-ray free-electron lasers
Rev. Sci. Instrum. 79, 083104 (2008); doi:10.1063/1.2964928
Published 6 August 2008
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We present the design, fabrication, and evaluation of a large total-reflection mirror for focusing x-ray free-electron laser beams to nanometer dimensions. We used an elliptical focusing mirror made of silicon that was 400 mm long and had a focal length of 550 mm. Electrolytic in-process dressing grinding was used for initial-step figuring and elastic emission machining was employed for final figuring and surface smoothing. A figure accuracy with a peak-to-valley height of 2 nm was achieved across the entire area. Characterization of the focused beam was performed at BL29XUL of SPring-8. The focused beam size was 75 nm at 15 keV, which is almost equal to the theoretical size.
©2008 American Institute of Physics
| History: | Received 10 March 2008; accepted 7 July 2008; published 6 August 2008 |
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REFERENCES (27)
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- XFEL: The European X-Ray Free-Electron Laser, DESY Technical Design Report No. 2006-097, 2006 (unpublished) (see also http://xfel.desy.de).
- Linac Coherent Light Source (LCLS), SLAC Conceptual Design Report, No. R593, 2002 (unpublished) (see also http://www-ssrl.slac.stanford.edu/lcls/cdr).
- SCSS X-FEL Conceptual Design Report, 2005 (unpublished) (see also http://www-xfel.spring8.or.jp).
- W. Ackermann et al.,
Nat. Photonics 1, 336 (2007) . - K. Janos,
Nat. Phys. 2, 799 (2006) . - K. Tamasaku and T. Ishikawa, Phys. Rev. Lett. 98, 244801 (2007).
- W. Liu, G. E. Ice, J. Z. Tischler, A. Khounsary, C. Liu, L. Assoufid, and A. T. Macrander, Rev. Sci. Instrum. 76, 113701 (2005).
- O. Hignette, P. Cloetens, G. Rostaing, P. Bernard, and C. Morawe, Rev. Sci. Instrum. 76, 063709 (2005).
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, K. Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, Appl. Phys. Lett. 90, 051903 (2007).
- C. G. Schroer, M. Kuhlmann, U. T. Hunger, T. F. Günzler, O. Kurapova, S. Feste, F. Frehse, B. Lengeler, M. Drakopoulos, A. Somogyi, A. S. Simionovici, A. Snigirev, I. Snigireva, and C. Schug, Appl. Phys. Lett. 82, 1485 (2003).
- H. C. Kang, J. Maser, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, and S. Vogt, Phys. Rev. Lett. 96, 127401 (2006).
- P. Kirkpatrick and A. V. Baez,
J. Opt. Soc. Am. 38, 766 (1948) . - R. Tatchyn, Proceedings of the Workshop on Scientific Applications of Short Wavelength Coherent Light Sources, March 1993 (unpublished), SLAC Report No. 414, SLAC-PUB 6064.
- R. Tatchyn, P. Csonka, H. Kilic, H. Watanabe, A. Fuller, M. Beck, A. Toor, J. Underwood, and R. Catura,
Proc. SPIE 733, 368 (1986) . - L. G. Parratt,
Phys. Rev. 95, 359 (1954) . - B. L. Henke, E. M. Gullikson, and J. C. Davis,
At. Data Nucl. Data Tables 54, 181 (1993) . - K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori,
Appl. Opt. 44, 6927 (2005) . - K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, Rev. Sci. Instrum. 73, 4028 (2002).
- H. Ohmori and T. Nakagawa,
CIRP Ann. 39, 329 (1990) . - S. Moriyasu, S. Morita, Y. Yamagata, H. Ohmori, J. Kato, I. Yamaguchi, and A. Makinouchi, Proceedings of the Ninth International Conference on Precision Science and Technology for Perfect Surfaces (9th ICPE) (unpublished), p. 366.
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, Rev. Sci. Instrum. 74, 2894 (2003).
- H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi, Rev. Sci. Instrum. 76, 045102 (2005).
- H. Ohashi, T. Tsumura, H. Okada, H. Mimura, T. Masunaga, Y. Senba, S. Goto, K. Yamauchi, and T. Ishikawa,
Proc. SPIE 6704, 670405 (2007) . - T. Ishikawa, K. Tamasaku, M. Yabashi, S. Goto, Y. Tanaka, H. Yamazaki, K. Takeshita, H. Kimura, H. Ohashi, T. Matsushita, and T. Ohata,
Proc. SPIE 4145, 1 (2001) . - K. Tamasaku, Y. Tanaka, M. Yabashi, H. Yamazaki, N. Kawamura, M. Suzuki, and T. Ishikawa,
Nucl. Instrum. Methods Phys. Res. A 467, 686 (2001) . - H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, Phys. Rev. A 77, 015812 (2008).
- L. Rayleigh, Philos. Mag. 8, 403 (1879).







