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Focusing mirror for x-ray free-electron lasers

Rev. Sci. Instrum. 79, 083104 (2008); doi:10.1063/1.2964928

Published 6 August 2008

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Hidekazu Mimura,1 Shinya Morita,2 Takashi Kimura,1 Daisuke Yamakawa,1 Weimin Lin,3 Yoshihiro Uehara,2 Satoshi Matsuyama,1 Hirokatsu Yumoto,4 Haruhiko Ohashi,4 Kenji Tamasaku,5 Yoshinori Nishino,5 Makina Yabashi,5 Tetsuya Ishikawa,5 Hitoshi Ohmori,2 and Kazuto Yamauchi1,6
1Department of Precision Science and Technology, Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
2RIKEN, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
3Faculty of Systems Science and Technology, Department of Machine Intelligence and Systems Engineering, Akita Prefectural University, 84-4 Tsuchiya-Ebinokuchi Yurihonjo, Akita 015-0055, Japan
4Japan Synchrotron Radiation Research Institute (JASRI)/SPring-8, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan
5RIKEN/SPring-8, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan
6Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2–1 Yamada-oka, Suita, Osaka 565–0871, Japan

We present the design, fabrication, and evaluation of a large total-reflection mirror for focusing x-ray free-electron laser beams to nanometer dimensions. We used an elliptical focusing mirror made of silicon that was 400  mm long and had a focal length of 550  mm. Electrolytic in-process dressing grinding was used for initial-step figuring and elastic emission machining was employed for final figuring and surface smoothing. A figure accuracy with a peak-to-valley height of 2  nm was achieved across the entire area. Characterization of the focused beam was performed at BL29XUL of SPring-8. The focused beam size was 75  nm at 15  keV, which is almost equal to the theoretical size. ©2008 American Institute of Physics
History: Received 10 March 2008; accepted 7 July 2008; published 6 August 2008
Permalink: http://link.aip.org/link/?RSINAK/79/083104/1
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KEYWORDS and PACS

Keywords
PACS
  • 42.79.Bh
    Optical lenses, prisms and mirrors
  • 42.60.By
    Design of specific laser systems
  • 41.60.Cr
    Free-electron lasers
  • YEAR: 2008

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PUBLICATION DATA

ISSN:
0034-6748 (print)   1089-7623 (online)
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