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Extreme-ultraviolet polarimeter utilizing laser-generated high-order harmonics

Rev. Sci. Instrum. 79, 103108 (2008); doi:10.1063/1.2999543

Published 27 October 2008

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Nicole Brimhall, Matthew Turner, Nicholas Herrick, David D. Allred, R. Steven Turley, Michael Ware, and Justin Peatross
Department of Physics and Astronomy, Brigham Young University, Provo, Utah 84602, USA
We describe an extreme-ultraviolet (EUV) polarimeter that employs laser-generated high-order harmonics as the light source. The polarimeter is designed to characterize materials and thin films for use with EUV light. Laser high harmonics are highly directional with easily rotatable linear polarization, not typically available with other EUV sources. The harmonics have good wavelength coverage, potentially spanning the entire EUV from a few to a hundred nanometers. Our instrument is configured to measure reflectances from 14 to 30 nm and has ~180 spectral resolution (lambda/Deltalambda). The reflection from a sample surface can be measured over a continuous range of incident angles (5°–75°). A secondary 14 cm gas cell attenuates the harmonics in a controlled way to keep signals within the linear dynamic range of the detector, comprised of a microchannel plate coupled to a phosphorous screen and charge coupled device camera. The harmonics are produced using ~10  mJ, ~35  fs, and ~800  nm laser pulses with a repetition rate of 10 Hz. Per-shot energy monitoring of the laser discriminates against fluctuations. The polarimeter reflectance data agree well with data obtained at the Advanced Light Source Synchrotron (Beamline 6.3.2). ©2008 American Institute of Physics
History: Received 24 March 2008; accepted 17 September 2008; published 27 October 2008
Permalink: http://link.aip.org/link/?RSINAK/79/103108/1
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KEYWORDS and PACS

Keywords
PACS
  • 81.70.Fy
    Nondestructive testing: optical methods
  • 07.60.Fs
    Optical polarimeters and ellipsometers
  • 42.62.Eh
    Metrological applications of lasers
  • 42.72.Bj
    Visible and ultraviolet sources
  • 42.65.Ky
    Optical frequency conversion; harmonic generation
  • 42.79.Pw
    Imaging detectors and sensors
  • YEAR: 2008

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PUBLICATION DATA

ISSN:
0034-6748 (print)   1089-7623 (online)
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