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The role of carrier gases in the production of metastable argon atoms in a rf discharge

Rev. Sci. Instrum. 80, 036105 (2009); doi:10.1063/1.3105722

Published 27 March 2009

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Kenneth Rudinger,1,2 Zheng-Tian Lu (卢征天),1,2 and Peter Mueller1
1Physics Division, Argonne National Laboratory, Argonne, Illinois 60439, USA
2Department of Physics and Enrico Fermi Institute, University of Chicago, Chicago, Illinois 60637, USA
We investigate the role of carrier gases in the production of metastable argon atoms in a rf-driven discharge. The effects of different carrier gases (krypton, xenon, neon, and helium), carrier gas pressures, and rf discharge powers are examined. A xenon carrier gas provides the greatest metastable population of argon, yielding an optimal fractional metastable population of argon (Ar*/Ar) of 2×10−4 at 0.2 mTorr of xenon gas. The optimal krypton configuration yields 60% of the xenon-supported population at 1.5 times higher pressure. Neon and helium perform considerably worse probably due to their higher ionization potentials. ©2009 American Institute of Physics
History: Received 29 January 2009; accepted 4 March 2009; published 27 March 2009
Permalink: http://link.aip.org/link/?RSINAK/80/036105/1
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KEYWORDS and PACS

Keywords
PACS
  • 52.80.Pi
    High-frequency and RF discharges
  • YEAR: 2009

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PUBLICATION DATA

ISSN:
0034-6748 (print)   1089-7623 (online)
Publisher:
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REFERENCES (5)
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