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Development of a surface conductivity measurement system for ultrahigh vacuum transmission electron microscope

Rev. Sci. Instrum. 80, 113702 (2009); doi:10.1063/1.3251272

Published 2 November 2009

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H. Minoda,1,2 K. Hatano,1 and H. Yazawa1
1Department of Applied Physics, Tokyo University of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan
2CREST, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan
The surface conductivity measurement system using a micro-four-point probe (M4PP) had been developed for the ultrahigh vacuum transmission electron microscope (UHV-TEM). Since the current distribution in the sample crystals during the current voltage measurement by the M4PP is localized within the depth of several micrometers from the surface, the system is sensitive to the surface conductivity, which is related with the surface superstructure. It was installed in the main chamber of the TEM and the surface conductivity can be measured in situ. The surface structures were observed by reflection electron microscopy and diffraction (REM-RHEED). REM-RHEED enables us to observe the surface superstructures and their structure defects such as surface atomic steps and domain boundaries of the surface superstructure. Thus the effects of the defects on the surface conductivity can be investigated. In the present paper we present the surface conductivity measurement system and its application to the Si(111)-sqrt(3)×sqrt(3)-Ag surface prepared on the Si(111) vicinal surfaces. The result clearly showed that the surface conductivity was affected by step configuration. ©2009 American Institute of Physics
History: Received 8 July 2009; accepted 27 September 2009; published 2 November 2009
Permalink: http://link.aip.org/link/?RSINAK/80/113702/1
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KEYWORDS and PACS

Keywords
PACS
  • 06.30.Ka
    Measurement of basic electromagnetic quantities
  • 73.25.+i
    Surface conductivity and carrier phenomena
  • 07.78.+s
    Electron, positron, and ion microscopes; electron diffractometers
  • 68.37.Lp
    Transmission electron microscopy (TEM) of surfaces, interfaces and thin films
  • 68.35.B-
    Structure of clean solid surfaces
  • YEAR: 2009

PUBLICATION DATA

ISSN:
0034-6748 (print)   1089-7623 (online)
Publisher:
AIP is a member of CrossRef AIP

REFERENCES (16)
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