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Near field photothermal printing of gold microstructures and nanostructures

Source: Appl. Phys. Lett. 97, 031112 (2010); doi:10.1063/1.3459977

Published 21 July 2010

KEYWORDS and PACS
Keywords
PACS
  • 81.16.Nd
    Nanolithography in nanofabrication and processing
  • 81.07.Gf
    Nanowires
  • 85.40.Hp
    Lithography, masks and pattern transfer (microelectronics)
  • 78.20.nb
    Photothermal effects
  • YEAR: 2010
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PUBLICATION DATA
ISSN:
1553-9644 (online)
Publisher:
AIP is a member of CrossRef AIP
Fan Xiao,1 Ting-Hsiang Wu,2 and Pei Yu Chiou1
1Department of Mechanical and Aerospace Engineering, University of California at Los Angeles (UCLA), Los Angeles, California 90095, USA
2Department of Electrical Engineering, University of California at Los Angeles (UCLA), Los Angeles, California 90095, USA
We report on a rapid near field photothermal printing (NPTP) approach for fabricating gold microstructures and nanostructures guided by flexible and transparent polymer molds. The optical energy of nanosecond laser pulse is spatially redistributed by a PDMS phase-shifting mask, resulting in selective gold melting in light intensity enhanced areas. The melted gold migrates to cold areas and forms desired structures after cooled down. Using NPTP, we have demonstrated rapid laser printing of periodic gold nanowire array with a 320 nm linewidth, nanosphere arrays with 400 nm in diameter, and nonperiodic structures across a 1  mm2 area with few laser pulses. ©2010 American Institute of Physics
History: Received 2 March 2010; accepted 10 June 2010; published 21 July 2010
Permalink: http://link.aip.org/link/?APPLAB/97/031112/1

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