Two-dimensional moveable optical pinhole with applications in single-detector imaging systems
Source: Electron. Lett. 46, 1215 (2010); doi:10.1049/el.2010.1299
Issue Date: 30 August 2010
KEYWORDS
PUBLICATION DATA
A MEMS electromagnetic driven 2D platform that is used to move an optical pinhole has been designed, fabricated, and characterised. The device is powered by Lorentz forces generated from current-varying wires in a magnetic field. A silicon-on-insulator micromachining process was used for the device prototyping. The dynamic performance of the device has been characterised. Based on the MEMS moveable optical pinhole, a new one-detector imaging system is proposed. The single-detector imaging system has potential applications in the infrared and terahertz spectrums.
| History: | Received 18 May 2010 |
| Permalink: | http://dx.doi.org/10.1049/el.2010.1299 |
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