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High Q optomechanical resonators in silicon nitride nanophotonic circuits

Source: Appl. Phys. Lett. 97, 073112 (2010); doi:10.1063/1.3480411

Published 18 August 2010

KEYWORDS and PACS
Keywords
PACS
  • 42.82.-m
    Integrated optics
  • 42.79.-e
    Optical elements, devices, and systems
  • YEAR: 2010
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PUBLICATION DATA
ISSN:
1553-9644 (online)
Publisher:
AIP is a member of CrossRef AIP
K. Y. Fong, W. H. P. Pernice, Mo Li, and H. X. Tang
Departments of Electrical Engineering, Yale University, New Haven, Connecticut 06511, USA
We demonstrate integrated photonic circuits made from stoichiometric silicon nitride for effective integration of high Q micromechanical resonators and nano-optical components. Using silicon bulk micromachining techniques we fabricate free-standing highly tensile nanostrings exceeding 400  µm in length. The nanostrings are actuated using gradient optical force and their mechanical motion is readout with a sensitive interferometric scheme. A mechanical Q of 340 000 is obtained in vacuum. This fully integrated optomechanical circuit presents a promising scheme for on-chip high Q mechanical sensing applications. ©2010 American Institute of Physics
History: Received 2 May 2010; accepted 27 July 2010; published 18 August 2010
Permalink: http://link.aip.org/link/?APPLAB/97/073112/1

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