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Crystal-induced effects at crystal/amorphous interfaces: The case of Si3N4/SiO2

Source: Phys. Rev. B 82, 081412 (2010); doi:10.1103/PhysRevB.82.081412

Published 25 August 2010

PACS
  • 68.35.Rh
    Phase transitions and critical phenomena (solid surfaces/interfaces)
  • 68.37.Ma
    Scanning transmission electron microscopy (STEM) of surfaces, interfaces and thin films
  • 68.35.bj
    Surface structure of amorphous semiconductors and glasses
  • YEAR: 2010
PUBLICATION DATA
ISSN:
1553-9644 (online)
Publisher:
AIP is a member of CrossRef APS
Weronika Walkosz,1 Robert F. Klie,1 Serdar Öğüt,1 Biljana Mikijelj,2 Stephen J. Pennycook,3,4 Sokrates T. Pantelides,4,3 and Juan C. Idrobo1,4,3
1Department of Physics, University of Illinois at Chicago, Chicago, Illinois 60607, USA
2Ceradyne, Inc., Costa Mesa, California 92626, USA
3Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, USA
4Department of Physics and Astronomy, Vanderbilt University, Nashville, Tennessee 37235, USA

We reveal the presence of atomic short-range ordering at the interface between crystalline beta-Si3N4 and amorphous SiO2 using aberration-corrected scanning transmission electron microscopy. We show that the first atomic layers of the amorphous SiO2 film reconstruct taking on the crystalline form of Si3N4. Furthermore, we find that there is a nonuniform interatomic mixing of oxygen and nitrogen at different atomic sites at the interface. The work provides a direct look at the atomic structure of crystal/amorphous interfaces composed of light elements. ©2010 The American Physical Society
History: Received 2 July 2010; revised 10 August 2010; published 25 August 2010
Permalink: http://link.aps.org/abstract/PRB/v82/e081412
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