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Growth sector dependence and mechanism of stress formation in epitaxial diamond growth

Source: Appl. Phys. Lett. 100, 041906 (2012); http://dx.doi.org/10.1063/1.3679611

Published 26 January 2012

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ISSN:
1553-9644 (online)
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AIP is a member of CrossRef AIP
M. Fischer,1 S. Gsell,1 M. Schreck,1 and A. Bergmaier2
1Universität Augsburg, Institut für Physik, D-86135 Augsburg, Germany
2Universität der Bundeswehr, Institut für Angewandte Physik und Messtechnik LRT2, D-85577 Neubiberg, Germany
Stress generation in epitaxial diamond growth was investigated by µ-Raman spectroscopy and high resolution x-ray diffraction. Intrinsic stress could be varied systematically from compressive to tensile covering a huge range of 5 GPa. The temperature-stress curve for growth on {111}-sectors as compared to {001} shows a shift of −200 °C or +2 GPa. A crucial role of hydrogen in the stress formation process is excluded. Due to the absence of grain boundaries, a model is proposed which is based on the “effective climb” of individual dislocations. The controlled generation of stress profiles offers a powerful concept for strengthening diamond mechanical devices. ©2012 American Institute of Physics
History: Received 14 October 2011; accepted 9 January 2012; published 26 January 2012
Digital Object Identifier: http://dx.doi.org/10.1063/1.3679611

REFERENCES (17)

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  1. H. Windischmann and G. F. Epps, Diamond Relat. Mater. 1, 656 (1992).
  2. W. D. Nix and B. M. Clemens, J. Mater. Res. 14, 3467 (1999).
  3. X. Xiao, B. W. Sheldon, Y. Qi, and A. K. Kothari, Appl. Phys. Lett. 92, 131908 (2008).
  4. Y. Qi, B. W. Sheldon, H. Guo, X. Xiao, and A. K. Kothari, Phys. Rev. Lett. 102, 056101 (2009).
  5. M. P. Gaukroger, P. M. Martineau, M. J. Crowder, I. Friel, S. D. Williams, and D. J. Twitchen, Diamond Relat. Mater. 17, 262 (2008).
  6. M. Mermoux, B. Marcus, A. Crisci, A. Tajani, E. Gheeraert, and E. Bustarret, J. Appl. Phys. 97, 043530 (2005).
  7. M. Schreck, F. Hörmann, H. Roll, J. K. N. Lindner, and B. Stritzker, Appl. Phys. Lett. 78, 192 (2001).
  8. S. Gsell, T. Bauer, J. Goldfuß, M. Schreck, and B. Stritzker, Appl. Phys. Lett. 84, 4541 (2004).
  9. S. Gsell, M. Fischer, R. Brescia, M. Schreck, P. Huber, F. Bayer, B. Stritzker, and D. G. Schlom, Appl. Phys. Lett. 91, 061501 (2007).
  10. M. Schreck, A. Schury, F. Hörmann, H. Roll, and B. Stritzker, J. Appl. Phys. 91, 676 (2002).
  11. X. Jiang, W. J. Zhang, M. Paul, and C.-P. Klages, Appl. Phys. Lett. 68, 1927 (1996).
  12. M. Schreck, C. Grunick, C. Haug, R. Brenn, and B. Stritzker, Diamond Relat. Mater. 11, 487 (2002).
  13. I. Sakaguchi, M. Nishitani-Gamo, K. P. Loh, S. Hishita, H. Haneda, and T. Ando, Appl. Phys. Lett. 73, 2675 (1998).
  14. R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart et al., J. Phys.: Condens. Matter 21, 364221 (2009).
  15. A. E. Romanov and J. S. Speck, Appl. Phys. Lett. 83, 2569 (2003).
  16. S. A. Stuart, S. Prawer, and P. S. Weiser, Appl. Phys. Lett. 62, 1227 (1993).
  17. J. Menčik, Solid Mechanics and its Applications: Mechanics of Components with Treated or Coated Surfaces (Kluwer Academic, Dordrecht, 1996), p. 9.
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