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Quantitative x-ray phase nanotomography

Source: Phys. Rev. B 85, 020104 (2012); http://dx.doi.org/10.1103/PhysRevB.85.020104

Published 31 January 2012

PACS
PUBLICATION DATA
ISSN:
1553-9644 (online)
Publisher:
AIP is a member of CrossRef APS
Ana Diaz,1 Pavel Trtik,2 Manuel Guizar-Sicairos,1 Andreas Menzel,1 Pierre Thibault,3 and Oliver Bunk1
1Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
2Empa, Swiss Federal Laboratories for Materials Science and Technology, CH-8600 Dübendorf, Switzerland
3Department of Physics, Technische Universität München, D-85748 Garching, Germany

X-ray ptychographic computed tomography has recently emerged as a nondestructive characterization tool for samples with representative sizes of several tens of micrometers, yet offering a resolution currently lying in but not limited to the 100-nm range. Here we evaluate the quantitativeness of this technique using a model sample with a known structure and density, and we discuss its sensitivity as a function of resolution. Additionally, we show an example application for the determination of the mass density of individual 2-µm-sized SiO2 microspheres with a relative error of 2%. The accuracy and sensitivity demonstrated in this paper will enable quantitative imaging, segmentation, and identification of different phases in complex materials at the nanoscale.
History: Received 2 November 2011; revised 9 January 2012; published 31 January 2012
Digital Object Identifier: http://dx.doi.org/10.1103/PhysRevB.85.020104
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