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A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications

Source: Appl. Phys. Lett. 96, 053703 (2010); doi:10.1063/1.3309586

Published 3 February 2010

KEYWORDS and PACS
Keywords
PACS
  • 43.58.Kr
    Spectrum and frequency analyzers and filters; acoustical and electrical oscillographs; photoacoustic spectrometers; acoustical delay lines and resonators
  • 77.84.Bw
    Dielectric, piezoelectric, and ferroelectric elements, oxides, nitrides, borides, carbides, chalcogenides, etc
  • 77.55.hd
    AlN
  • 43.58.-e
    Acoustical measurements and instrumentation
  • YEAR: 2010
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PUBLICATION DATA
ISSN:
1553-9628 (online)
Publisher:
AIP is a member of CrossRef AIP
Wencheng Xu, Seokheun Choi, and Junseok Chae
School of Electrical, Computer and Energy Engineering, Arizona State University, Tempe, Arizona 85287, USA
This letter reports an acoustic resonator of high quality factors (Qs) operating in liquid media. The film bulk acoustic resonator (FBAR) is made of a ring-shaped piezoelectric aluminum nitride thin film, and is excited in a contour mode. By having a low motional resistance upon coupling with liquids, the contour mode FBAR achieved Qs up to 189, more than 12× over the state-of-the-art FBARs in liquids. The resonator was characterized by an aptamer—thrombin binding pair for a biosensor and showed a mass resolution of 1.78  ng/cm2. ©2010 American Institute of Physics
History: Received 4 September 2009; accepted 14 January 2010; published 3 February 2010
Permalink: http://link.aip.org/link/?APPLAB/96/053703/1

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