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Fast three dimensional ac electro-osmotic pumps with nonphotolithographic electrode patterning

Source: Biomicrofluidics 4, 036501 (2010); doi:10.1063/1.3463719

Published 16 July 2010

KEYWORDS and PACS
Keywords
PACS
  • 87.80.Ek
    Mechanical and micromechanical techniques (biophysical research methods)
  • 81.16.-c
    Methods of nanofabrication and processing
  • 87.50.ch
    Electrophoresis/dielectrophoresis and other mechanical effects in biological systems
  • 82.39.Wj
    Ion exchange, dialysis, osmosis, electro-osmosis, membrane processes in biological systems
  • YEAR: 2010
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PUBLICATION DATA
ISSN:
1553-9628 (online)
Publisher:
AIP is a member of CrossRef AIP
Y. M. Senousy and C. K. Harnett
University of Louisville, Louisville, Kentucky 40208, USA
Three dimensional (3D) stepped electrodes dramatically improve the flow rate and frequency range of ac electro-osmotic pumps, compared to planar electrodes. However, the fabrication of 3D stepped electrodes for ac electro-osmosis (ACEO) pumps usually involves several processing steps. This paper demonstrates results from ACEO pumps produced by a faster and less expensive method to fabricate the 3D electrodes—extending the previous work to disposable devices. The method is based on shadowed evaporation of metal on an insulating substrate that can be injection molded. Flow velocities through the 3D ACEO pump are similar to those seen in the previous work. ©2010 American Institute of Physics
History: Received 8 May 2010; accepted 19 June 2010; published 16 July 2010
Permalink: http://link.aip.org/link/?BIOMGB/4/36501/1

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